Composite gas barrier laminate and method for producing same, and composite electrode
A laminated body and gas barrier technology, which is applied in semiconductor/solid-state device manufacturing, chemical instruments and methods, synthetic resin layered products, etc., can solve problems such as performance degradation, and achieve softness, flexibility, good gas barrier properties, and excellent curl effect
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[0211] [Example 1]
[0212] A rolled alicyclic polyolefin resin film (a film containing norbornene polymer, "ZeonorFilm ZF16" manufactured by Zeon Corporation, thickness 100μm) was drawn out, and a sputtering device was used to form SiN with a thickness of 100nm on one surface Film to obtain a gas barrier laminate (A). The obtained gas barrier laminate (A) had a curl with a curl amount of 4 mm.
[0213] Furthermore, in the same manner as the gas barrier laminate (A) described above, a gas barrier laminate (B) was produced.
[0214] In addition, a film formed of a styrene isoprene styrene copolymer having a thickness of 100 μm was prepared as a thermoplastic elastomer film. The above-mentioned styrene isoprene styrene copolymer is an aromatic vinyl compound-conjugated diene produced by using styrene as an aromatic vinyl compound and isoprene as a chain conjugated diene compound The polymer obtained by hydrogenating the block copolymer and further modifying with alkoxysilane has a t...
Example Embodiment
[0220] [Example 2]
[0221] A rolled alicyclic polyolefin resin film (a film containing norbornene polymer, "ZeonorFilm ZF16" manufactured by Zeon Corporation, 100μm in thickness) was drawn out, and a plasma CVD device was used to form a thickness of 1μm on one surface SiOC film to obtain a gas barrier laminate (A). The obtained gas barrier laminate (A) had a curl with a curl amount of 15 mm.
[0222] Furthermore, in the same manner as the gas barrier laminate (A) described above, a gas barrier laminate (B) was produced.
[0223] In addition, the same thermoplastic elastomer film as in Example 1 was prepared.
[0224] The gas barrier laminate (A) and the gas barrier laminate (B) are arranged so that the SiOC film faces each other, and the thermoplastic elastomer film is sandwiched between the gaps. While the gas barrier laminate (A), the thermoplastic elastomer film, and the gas barrier laminate (B) laminated in this way were pressed from both sides under the same conditions as in E...
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