Gas barrier film
A technology of gas barrier property and gas barrier layer, applied in the field of gas barrier film, which can solve the problems of gas barrier layer defects and inability to stably obtain high gas barrier properties
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Example Embodiment
[0132] (Example 1)
[0133] (Formation of the first layer)
[0134] As the polymer substrate 1, a polyethylene terephthalate film having a thickness of 50 μm ("LUMIRA" (registered trademark) U48 manufactured by Toray Corporation) was used.
[0135] use Figure 5 The wound-type sputtering-chemical vapor deposition apparatus 4 (hereinafter referred to as the sputtering-CVD apparatus) shown in the winding type has a sputtering target that is a mixed sintered material formed of zinc oxide, silicon dioxide, and aluminum oxide. The sputtering electrode 11 is sputtered using argon and oxygen, and ZnO-SiO is provided as the first layer on the surface of the polymer substrate 1 2 -Al 2 O 3 Layer so that the film thickness becomes 150 nm.
[0136] The specific operation is as follows. First, a sintered sputtering target with a composition mass ratio of zinc oxide / silica / alumina of 77 / 20 / 3 is set on the sputter electrode 11 of the sputter-CVD apparatus 4. The unwinding roll 6 in the winding c...
Example Embodiment
[0144] (Example 2)
[0145] (Synthesis of polyurethane compounds with aromatic ring structure)
[0146] In a 5-liter 4-necked flask, 300 parts by mass of bisphenol A diglycidyl ether acrylic acid adduct (manufactured by Kyoeisha Chemical Co., Ltd., trade name: epoxy ester 3000A) and 710 parts by mass of ethyl acetate were added. Heat so that the internal temperature becomes 60°C. 0.2 parts by mass of di-n-butyltin dilaurate was added as a synthesis catalyst, and 200 parts by mass of dicyclohexylmethane 4,4'-diisocyanate (manufactured by Tokyo Chemical Industry Co., Ltd.) was added dropwise over 1 hour while stirring. After the completion of the dropping, the reaction was continued for 2 hours, and then 25 parts by mass of diethylene glycol (manufactured by Wako Pure Chemical Industries, Ltd.) was dropped over 1 hour. The reaction was continued for 5 hours after the dropping, and a polyurethane compound having an aromatic ring structure with a weight average molecular weight of 20...
Example Embodiment
[0156] (Example 3)
[0157] Set up ZnO-SiO as the first layer 2 -Al 2 O 3 Except that the layer had a thickness of 450 nm, the same procedure as in Example 2 was carried out to obtain a gas barrier film.
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