A sand box cooling multi-wire cutting machine

Abstract

The invention relates to a multi-wire sawing machine, in particular to a sand box cooling type multi-wire sawing machine. The sand box cooling type multi-wire sawing machine comprises a sand box and a cooling mechanism, wherein a stirring pump, a mortar pump, a mortar outlet, an observation port cover and a sand return port filter screen are arranged on the sand box; the cooling mechanism comprises an oil cooling machine, a temperature meter, an outer-ring pipeline and an inner-ring pipeline, and always operates at a set temperature; cooling oil in the oil cooling machine always circularly cools an abrasive material between the inner-ring pipeline and the outer-ring pipeline at a set temperature; and the temperature meter monitors the temperature of the abrasive material in the sand box all the way to effectively control the temperature and the uniformity of the abrasive material, so that the influence of the temperature and the uniformity of the abrasive material on the size of machined parts is eliminated, the quality of workpieces is guaranteed, and the production efficiency is improved.

Description

technical field [0001] The invention relates to a multi-wire cutting machine, in particular to a sand box cooling multi-wire cutting machine. Background technique [0002] Multi-wire cutting is a new cutting method that brings abrasive materials into the semiconductor processing area for grinding through high-speed reciprocating motion of metal wires, and cuts hard and brittle materials such as semiconductors into hundreds of thin slices at a time. The abrasive used in existing multi-wire cutting machines is a mixture of liquid oil and silicon carbide. The machining accuracy of the workpiece is affected by the abrasive. The first influencing factor is the temperature change of the abrasive. According to the principle of thermal expansion and contraction, the greater the temperature change of the abrasive, the lower the machining accuracy of the workpiece during grinding; the second is the liquid uniformity of the abrasive. Processing under the condition of uneven abrasive w...

AI Technical Summary

Problems solved by technology

The machining accuracy of the workpiece is affected by the abrasive. The first influencing factor is the temperature change of the abrasive. According to the principle of thermal expansion and contraction, the greater the temperature change of the abrasive, the lower the machining accuracy of the workpiece during grinding; the second is the liquid uniformity of the abrasive. Processing under the condition of uneven abrasive will have a great impact on the surface roughness and processing accuracy of the workpiece

The reasons that affect the temperature change of the abrasive: one is that a large amount of heat is generated in the process of repeated grinding, and the other is that the abrasive will also be affected by the external temperature in the sand box; therefore, a new technical solution is needed to solve the above-mentioned technology. question

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