A low optical loss mems thermo-optic tunable filter

A tunable filter and optical loss technology, which is applied in optics, nonlinear optics, instruments, etc., can solve the problem of high optical loss of thermo-optic tunable filters, and achieve the improvement of filter waveforms that cannot meet the application, good application prospects, and low extinction The effect of the coefficient

Active Publication Date: 2018-07-31
ANHUI CHINA SCI MW ELECTRONIC TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In view of the shortcomings of the prior art described above, the object of the present invention is to provide a MEMS thermo-optic tunable filter with low optical loss, which is used to solve the problem of high optical loss of the thermo-optic tunable filter in the prior art

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  • A low optical loss mems thermo-optic tunable filter
  • A low optical loss mems thermo-optic tunable filter
  • A low optical loss mems thermo-optic tunable filter

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Embodiment 1

[0037] Such as Figure 1 ~ Figure 3 As shown, the present invention provides a MEMS thermo-optic tunable filter with low optical loss, and the MEMS thermo-optic tunable filter comprises a multi-cavity optical fiber whose half-wave resonant cavity adopts AlN or GaN thermo-optic tunable dielectric film material 11 The interference thin film filter layer 1 and the micro heater 2 can adjust the central wavelength of the MEMS thermo-optic tunable filter by controlling the operating current of the micro heater 2 .

[0038] Such as figure 1As shown, the MEMS thermo-optic tunable filter in this embodiment includes: a multi-cavity optical interference thin film filter layer 1, a single crystal silicon support film 4, a single crystal silicon suspension beam 6, an optical antireflection film 5, and a silicon substrate 7. Micro heater 2, micro temperature sensor 3 and lead wire pad 8.

[0039] Wherein, the multi-cavity optical interference thin film filter layer 1 is formed on the sing...

Embodiment 2

[0050] Such as figure 2 and Figure 4 ~ Figure 5 As shown, the present invention provides a MEMS thermo-optic tunable filter with low optical loss, and the MEMS thermo-optic tunable filter comprises a multi-cavity optical fiber whose half-wave resonant cavity adopts AlN or GaN thermo-optic tunable dielectric film material 11 The interference thin film filter layer 1 and the micro heater 2 can adjust the central wavelength of the MEMS thermo-optic tunable filter by controlling the operating current of the micro heater 2 .

[0051] Such as Figure 4 ~ Figure 5 As shown, when the multi-cavity optical interference thin film filter layer 1 has sufficient mechanical strength, the MEMS thermo-optic tunable filter in this embodiment includes: multi-cavity optical interference thin film filter layer 1, silicon Substrate 7 , light hole, micro heater 2 , micro temperature sensor 3 and lead pad 8 .

[0052] The multi-cavity optical interference film filter layer 1 is formed on a silic...

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Abstract

The invention provides an MEMS thermo-optical tunable filter with low optical loss. The MEMS thermo-optical tunable filter comprises a multi-cavity optical interference film filter layer with a half-wave resonant cavity made from an AlN or GaN thermo-optical adjustable medium film material, and a microwave heater, and the central wavelength of the MEMS thermo-optical tunable filter can be adjusted by controlling the working current of the microwave heater. According to the MEMS thermo-optical tunable filter provided by the invention, AlN or GaN is used as the cavity body material of the half-wave resonant cavity in the optical interference film, and has a higher thermo-optical coefficient and a lower extinction coefficient, so that the optical loss of the narrowband tunable filter can be greatly reduced. The MEMS thermo-optical tunable filter provided by the invention can be used for effectively solving the problems that an existing MEMS thermo-optical tunable filter has high optical loss and the filtering waveform cannot satisfy the application, and has good application prospects in the fields of optical communication and optical sensing.

Description

technical field [0001] The invention belongs to the fields of optical fiber communication, optical fiber sensing and MEMS optical devices, and in particular relates to a MEMS thermo-optic tunable filter with low optical loss. Background technique [0002] Tunable optical filters usually refer to optical filters with adjustable central wavelength of optical bandpass filters. Due to the flexibility of wavelength adjustment, they have important applications in the fields of optical fiber communication and optical fiber sensing, and are the key components of intelligent optical networks. One of the key components. Tunable optical filters based on MEMS technology have increasingly become the focus of research and development because of their advantages of miniaturization, integration, batch manufacturing, and low cost. [0003] At present, MEMS optically tunable filters are mainly based on the Fabry-Perot cavity interference principle, and the wavelength tuning mechanism mainly ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/01
CPCG02F1/0147
Inventor 吴亚明徐静江火秀
Owner ANHUI CHINA SCI MW ELECTRONIC TECH CO LTD
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