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Echo wall microcavity acoustic sensor, and preparation method of double-ring resonant cavity thereof

An acoustic sensor and double-loop resonance technology, which is applied in the field of acoustic sensors, can solve the problems of low sensitivity, low resolution, complex preparation process, etc., and achieve the effect of obvious optical effect, high peak sensitivity and noise reduction

Active Publication Date: 2019-11-12
NANJING UNIV OF POSTS & TELECOMM
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Problems solved by technology

[0004] Aiming at the deficiencies of the prior art, the purpose of the present invention is to provide a whispering gallery micro-cavity acoustic sensor and a preparation method of the double-ring resonant cavity thereof, so as to solve the problems of low sensitivity, low resolution and complicated preparation process existing in the prior art. question

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  • Echo wall microcavity acoustic sensor, and preparation method of double-ring resonant cavity thereof
  • Echo wall microcavity acoustic sensor, and preparation method of double-ring resonant cavity thereof
  • Echo wall microcavity acoustic sensor, and preparation method of double-ring resonant cavity thereof

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Embodiment Construction

[0032] The working principle and technical solutions of the present invention will be further described in detail below in conjunction with the accompanying drawings and specific implementation.

[0033] Such as figure 1 As shown, a whispering gallery microcavity acoustic sensor includes a laser 7, a spectrum system, a double-ring resonator 4, a silicon column 3, a silicon substrate 2, a stage 1 and an ultrasonic sound source 9, and the spectrum system includes a mirror 6, Spectrometer 8, focusing objective lens 5.

[0034] The incident laser light emitted by the laser 7 is horizontally injected into the reflector 6 inside the spectroscopic system;

[0035] The internal reflection mirror 6 of the spectrum system vertically injects the horizontally incident laser into the focusing objective lens 5 inside the spectrum system,

[0036] The laser light transmitted by the reflector 6 inside the spectroscopic system is vertically injected into the spectrometer 8;

[0037] The foc...

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Abstract

The invention discloses an echo wall microcavity acoustic sensor, and a preparation method of a double-ring resonant cavity thereof. The sensor comprises a laser, a spectrum system, and a double-ringresonant cavity; the laser is used for emitting laser to the spectrum system; and the spectrum system is used for vertically reflecting the laser to the double-ring resonant cavity. The sensitivity ofthe acoustic sensor is improved, and sound waves can be efficiently detected.

Description

technical field [0001] The invention relates to the field of acoustic sensors based on silicon chips, in particular to a microcavity acoustic sensor for a whispering gallery and a preparation method for a double-ring resonant cavity thereof. Background technique [0002] Traditional acoustic sensors convert sound pressure waves into vibrations of mechanical components and detect these vibrations qualitatively through changes in piezoelectricity, resistivity, permeability, or capacitance. This type of sensor has a large size, is greatly affected by noise, and has a large optical loss. With the continuous development and maturity of acoustic sensing technology, the requirements for spatial, temporal and directional resolution in application fields are getting higher and higher, which promotes the development of ultrasonic frequency and microscale sensing devices. [0003] At present, the traditional acoustic sensing technology still has the problems of low sensitivity, low re...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01H9/00
CPCG01H9/00
Inventor 朱刚毅朱姚成方铭秦飞飞王永进
Owner NANJING UNIV OF POSTS & TELECOMM
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