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Preparation method of high-temperature corrosion-resistant evaporation beam source device for cigs solar cells

A technology of solar cells and source devices, which is applied in the manufacture of circuits, electrical components, and final products, can solve problems such as reducing the adaptability of evaporation source beams, achieve small thermal expansion coefficients, strong corrosion resistance and oxidation resistance, and improve The effect of heating efficiency

Active Publication Date: 2017-06-27
CHINA ELECTRONIC TECH GRP CORP NO 18 RES INST
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since the evaporation source does not protect the heating wire, the use of this structure will cause damage to the heating wire of the evaporation source during the evaporation deposition process of CIGS solar cells, and the resistance change caused by the damage of the heating wire will directly affect the evaporation source. At the same time, the effect of reducing condensation on the top of the evaporation source due to the pursuit of separate heating at the top reduces the adaptability of the evaporation source beam flow

Method used

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  • Preparation method of high-temperature corrosion-resistant evaporation beam source device for cigs solar cells
  • Preparation method of high-temperature corrosion-resistant evaporation beam source device for cigs solar cells
  • Preparation method of high-temperature corrosion-resistant evaporation beam source device for cigs solar cells

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preparation example Construction

[0034] A method for preparing a high-temperature corrosion-resistant evaporation beam source device for CIGS solar cells, including a furnace body with heating wires, is characterized in that it also includes the following preparation steps:

[0035] (1) After installing a layer of protective heating wire unit on the furnace body, put it into the shell bracket with a shielding structure near the lower end inside; The inner walls of the shell and the bottom shell are made with spiral grooves for placing heating wires, and there is a stepped circle between the upper end of the top shell and the outer circle; the shielding structure is three cylinders perpendicular to the horizontal plane The body is used as the shielding layer support column, and the multi-layer molybdenum sheets parallel to each other and perpendicular to the shielding layer support column are inserted on the three shielding layer support columns as the shielding layer;

[0036] (2) Fix a chassis at the bottom ...

Embodiment

[0044] Made according to size requirements such as figure 2 Shown top has the boron nitride cylindrical crucible 3 of outer edge as body of furnace, places evaporation material 12 in the crucible; Make with high-purity graphite such as Figure 10 The nozzle shown in the figure; a nozzle 4 with a variable shape is tightly fitted into the upper end of the crucible, and the shape of the evaporation source beam can adjust the effect of deposition; through Figure 8The middle thermocouple line routing hole 22 fixes (W-3Re) / (W-25Re) or (W-5Re) / (W-26Re) type tungsten-rhenium thermocouples on the bottom and top of the outside of the crucible respectively; The outer diameter of the barrel is made as image 3 The boron nitride sleeves whose two inner diameters are closely matched with the outer diameter of the crucible barrel are used as the top shell 1 and the bottom shell 2, wherein there is a stepped circle between the upper end of the top shell and the outer circle, and the top sh...

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Abstract

The invention relates to a method for manufacturing a high-temperature and corrosion resistant evaporation beam source device for a CIGS solar cell. The method involves a furnace body with heating wires. The method is characterized by including the following manufacturing steps that firstly, after a heating wire protective unit is arranged outside the furnace body, the furnace body is placed in a shell support with a shielding structure arranged at the portion close to the lower end in the shell support; secondly, a bottom disc is fixed to the bottom of the shell support and the lower face of the bottom disc is fixed to an electric controller through a supporting rod; thirdly, an evaporation source top shading sheet and a sealing clamp ring are manufactured, the top shell outer wall on the upper face of the shell support in the heating wire protective unit in the first step is sleeved with the sealing clamp ring, and the large circular wall of the evaporation source top shading sheet is clamped on the portion, between the outer edge of the furnace body and the sealing clamp ring, of a top shell. The outer wall of the furnace body is sleeved with the top shell with grooves formed in the inner wall and a bottom shell with grooves formed in the inner wall, the heating wires can be fixed, and the service life of the heating wires is prolonged; due to the fact that the heating wires make tighter contact with the furnace body, the heating efficiency of the heating wires is further improved.

Description

technical field [0001] The invention belongs to the technical field of thin-film solar cell manufacturing equipment, and in particular relates to a method for preparing a high-temperature corrosion-resistant evaporation beam source device for CIGS solar cells. Background technique [0002] At present, most of the heating methods of the beam source used for evaporation coating are induction coil, electron beam bombardment, magnetron arc and heating wire heating method. All the evaporation sources that use the above-mentioned heating methods can enable us to obtain a stable material stream. In the process of thin film deposition and preparation, we require the beam to be stable, repeatable, and controllable, and also have the characteristics of easy maintenance and repair, and strong adaptability. [0003] The technology of evaporation source in terms of beam stability is relatively mature, and the repeatability of small equipment during use can already meet our short-term pr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18
CPCY02P70/50
Inventor 赵岳王赫张超邓朝文张翰明赵彦民乔在祥
Owner CHINA ELECTRONIC TECH GRP CORP NO 18 RES INST