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Method for determining surface roughness, optical constant and thickness of optical thin film simultaneously

A technology of surface roughness and optical constant, applied in optical constant and thickness, at the same time to determine the surface roughness of optical film, can solve the problem of obtaining the optical constant and thickness of film

Inactive Publication Date: 2015-07-22
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Abstract
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  • Claims
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Problems solved by technology

If the influence of the rough surface of the film on the spectral properties of the film is not considered, it is impossible to obtain the optical constants and thickness of the film accurately by using the traditional photometry

Method used

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  • Method for determining surface roughness, optical constant and thickness of optical thin film simultaneously
  • Method for determining surface roughness, optical constant and thickness of optical thin film simultaneously
  • Method for determining surface roughness, optical constant and thickness of optical thin film simultaneously

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Embodiment Construction

[0034] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0035] figure 1It is a schematic flow chart of simultaneously determining the surface roughness, optical constant and thickness of an optical film by photometry in the present invention. The specific implementation steps are as follows: First, use a spectrophotometer to measure the spectral data of the optical thin film; then establish an accurate thin film structure model that can reflect the physical reality of the thin film based on the measured spectral data of the thin film; The surface structure is used to reflect the physical reality of the film. According to the characteristics of each part, the film body structure model and the film surface structure model are respectively established; the optical transmission matrix of the corresponding structure model is given, and the optical transmission matrix of the entire film is obtained from t...

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Abstract

The invention discloses a method for determining the surface roughness, an optical constant and the thickness of an optical thin film simultaneously. The method includes adopting a spectrophotometer to measure spectroscopic data of the optical thin film, creating an accurate thin film structure model capable of reflecting thin film physics according to the actually measured spectroscopic data of the thin film, inverting the actually measured spectroscopic data of the thin film according to the accurate thin film structure model, and determining the surface roughness, the optical constant and the thickness of the thin film simultaneously through multi-parameter fitting. The method has the advantages that the optical constant and the thickness of the thin film can be acquired accurately, the surface toughness of the thin film can be determined precisely, and the method is particularly applicable to parameter determination of vacuum ultraviolet / deep ultraviolet thin films.

Description

technical field [0001] The invention relates to a method for determining parameters of an optical film, in particular to a method for simultaneously determining the surface roughness, optical constant and thickness of an optical film. Background technique [0002] Optical constants, namely refractive index and extinction coefficient, are very important parameters of optical thin films, but the optical constants of thin films are greatly affected by the preparation process. In order to manufacture thin film devices with stable performance and high yield, it is necessary to accurately obtain the optical constants of thin films. The most common method currently used to determine the optical constants of thin films is the photometric method, which calculates the optical constants of thin films based on the transmittance or reflectance spectral curve of the thin film. Usually, before using the photometric method to determine the optical constants of the thin film, it is necessary...

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Application Information

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IPC IPC(8): G01B11/30G01B11/06G01N21/31
Inventor 郭春李斌成孔明东
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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