Detection device and method for thin-film transistor array substrate
A technology of thin-film transistors and array substrates, which is applied in the field of detection devices for thin-film transistor array substrates, can solve problems such as missed inspections of products, and achieve the effects of avoiding missed inspections and enhancing electrical activity
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[0027] In order to further illustrate the technical means and functions adopted by the present invention to achieve the intended invention purpose, the present invention will be described in detail below in conjunction with the accompanying drawings and preferred embodiments.
[0028] An embodiment of the present invention provides a detection device (array tester) for a thin film transistor array substrate, which is used for detecting whether there is a pixel defect in the manufactured thin film transistor array substrate, especially for detecting whether there is amorphous silicon (a-Si ) remains.
[0029] The electrical properties of amorphous silicon semiconductors change strongly with temperature, that is, the higher the temperature, the stronger the electrical properties. This change is mainly due to the change of carrier concentration in the semiconductor with temperature. For an absolutely pure semiconductor at absolute zero, the semiconductor covalent bond is saturate...
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