Method for preparing continuous surface-shape spiral phase plate

Abstract

The invention discloses a method for preparing a continuous surface-shape spiral phase plate, and relates to the field of micro machining, spinning optics and the like. In order to overcome the defects of low preparation efficiency, high cost and the like during preparation of the spiral phase plate in the prior art, the invention provides a novel method for preparing the continuous surface-shape spiral phase plate. According to the method, quantitative combination is performed on a target surface phase to form a mask structure, and the mask structure is utilized to realize modulating quantity of illumination, so that the preparation of the continuous surface-shape spiral phase plate can be realized by utilizing single-time exposure, and the method is a novel method which is low in cost, high in efficiency, practical and relatively large in application prospect.

Description

technical field [0001] The invention relates to the technical field of micromachining, in particular to a method for preparing a continuous surface spiral phase plate. Background technique [0002] Spiral phase plate is a device with special optical properties. Its optical thickness gradually increases with the rotation angle. When light is incident on the spiral phase plate, parallel light will be transformed into vortex light carrying angular momentum. This vortex light is used in optical tweezers, ion manipulation, quantum communication There are good applications in other fields. Therefore, there is an urgent requirement for its preparation technology. Electron beam direct writing and focused ion beam direct writing are methods for preparing helical phase plate structures, but this method requires expensive equipment, and because it uses point-by-point direct writing, the preparation efficiency is very low and it is difficult to meet practical requirements. At presen...

AI Technical Summary

Problems solved by technology

Electron beam direct writing and focused ion beam direct writing are methods for preparing helical phase plate structures, but this method requires expensive equipment, and because it uses point-by-point direct writing, the preparation efficiency is very low and it is difficult to meet Practical requirements

At present, there is another processing technology that uses a step-like structure to approximate this continuous surface structure and completes its processing by multiple overlays. However, this method requires many preparation processes and requires alignment. Overlay equipment with very high precision, high manufacturing cost

And because the finished structure is a stepped structure, its optical conversion efficiency is low

Then this poses a great challenge to the processing technology of the spiral phase plate, making it an urgent problem to be solved

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