Thin-film transistor and manufacturing method thereof, array substrate and display device

Abstract

The invention provides a manufacturing method of a thin-film transistor. The method comprises a step of deposition of an amorphous silicon layer; a step of formation of a polycrystalline silicon layer through crystallizing treatment; a step of formation of an active layer; a step of formation of channel doping; a step of carbon ion injection; a step of formation of via holes; a step of formation of a gate electrode insulating layer and a gate electrode; and a step of formation of a source electrode and a drain electrode. According to the manufacturing method of the thin-film transistor, forbidden bandwidth of the active layer can be enhanced and thus leakage current of a low-temperature polycrystalline silicon thin-film transistor can be reduced. Besides, visible light absorption coefficient of low-temperature polycrystalline silicon can also be reduced, and light-induced leakage current generated by a backlight source can be reduced. Furthermore, the manufacturing method of the thin-film transistor is suitable for existing polycrystalline silicon thin-film transistor production lines without additional number of times of photo-masking or modification of production equipment, and thus the operation method is easy and convenient. The invention also provides the thin-film transistor, an array substrate and a display device.

Description

technical field [0001] The invention relates to the field of semiconductor devices, in particular to a thin film transistor and a manufacturing method thereof, an array substrate and a display device. Background technique [0002] Thin film transistor liquid crystal display (TFT-LCD) is the most important type in the field of flat panel display, because it has many advantages, such as thin size, light weight, excellent picture quality, low power consumption, long life, digital, etc., and it is also the only Display technology that spans all sizes, and its application fields are very wide, covering almost the main electronic products in today's information society, such as TV, monitor, portable computer, mobile phone, PDA, GPS, vehicle display, instrumentation, public display and medical display etc. [0003] In liquid crystal displays, thin film transistors are generally used as switching elements to control pixels, or as driving elements to drive pixels. Thin film transis...

AI Technical Summary

Problems solved by technology

However, the negative impact of these methods is that the TFT area increases significantly and the aperture ratio of the display decreases

In high-resolution displays, as the resolution increases, the area of ​​each pixel becomes smaller and smaller. In a limited pixel area, the off-state current of the polysilicon thin film transistor is reduced by increasing the channel length of the TFT. The disadvantages are also becoming more and more obvious and difficult to maintain

Images