834 results about "Low-temperature polycrystalline silicon" patented technology

The invention discloses an etching method, a low-temperature polysilicon thin film transistor and an AMOLED panel. The etching method comprises the steps of pumping sulfur hexafluoride SF<6> and oxygen O<2> to a process chamber to perform etching on a metal molybdenum Mo layer to obtain molybdenum fluoride MoF<x>; pumping chlorine Cl<2> and oxygen O<2> to perform etching on the metal molybdenum Molayer to obtain molybdenum chloride MoCl<x>; and pumping a fluoro-etching gas and oxygen O<2> to be reacted with MoCl<x> to obtain easily volatile molybdenum oxyfluoride MoF<x>O<y>. By virtue of thescheme provided by the invention, residue of dry etching resultants can be reduced, and the problem of a display abnormal phenomenon of the AMOLED panel is solved.

A method of fabricating a low temperature poly-silicon (LTPS). A plurality of semiconductor heat sinks are formed over a substrate. A buffer layer and an amorphous silicon layer are formed over the substrate and the semiconductor heat sinks. Following that, a laser crystallization process is performed to transform the amorphous silicon layer into a poly-silicon layer.

Disclosed herein is an OLED (Organic Light Emitting Display) device. A switching thin-film transistor configured to be an oxide semiconductor thin-film transistor is disposed in a first pixel. A second pixel is adjacent to the first pixel in the direction in which data lines are extended. A switching thin-film transistor configured to be an LTPS (Low Temperature Poly-Silicon) thin-film transistor is disposed in the second pixel. The switching thin-film transistor of the first pixel and the switching thin-film transistor of the second pixel are connected to the same gate line. A pixel and another pixel adjacent to the pixel connected to a gate line in common, so that it is possible to provide an OLED device with high aperture ratio and high resolution.

The present invention discloses an apparatus of ion sensitive thin film transistor and method of manufacturing of the same. The apparatus of the invention, formed on a glass substrate, comprises an ion detector, formed on said glass substrate, including a plurality of ion sensitive transistors and a signal processor with display, also formed on said glass substrate, being coupled with said ion detector. The signal processor with display further comprises a circuit of signal processing, a driver circuit, and a display, wherein by means of the method of Low Temperature PolySilicon, i.e. LTPS technology, the invention integrates said ion detector and said signal processor with display on said glass substrate to become an tiny, light and thin apparatus with portable and disposable characteristics.

Embodiments of the invention disclose an array substrate and a manufacturing method therefor. The array substrate comprises a plurality of first thin film transistors and a plurality of second thin film transistors; the first thin film transistors and the second thin film transistors are formed above a substrate; the active layer of each first thin film transistor is low-temperature polysilicon; the active layer of each second thin film transistor is an oxide semiconductor; the first thin film transistors are positioned in a peripheral circuit region of the array substrate; the second thin film transistors are positioned in a display region of the array substrate; the grid electrodes of the first thin film transistors and the second thin film transistors are positioned on different layers; and the source and drain electrodes of the first thin film transistors and the source and drain electrodes of the second thin film transistors are positioned on the same layer. By adoption of the array substrate and the manufacturing method therefor, the problem of incompatibility of two film layers of two types of thin film transistors when the metal oxide thin film transistors and the low-temperature polysilicon thin film transistors are formed in a display panel at the same time is solved, so that the electrical performance and the stability of the display panel are improved.

An organic light emitting display is provided. The organic light emitting display comprises a multi-type thin-film transistor (TFT) and an organic light emitting diode. The multi-type TFT has a low-temperature-poly-silicon (LTPS) TFT and an oxide semiconductor TFT (oxide TFT) disposed on the LTPS TFT. The organic light emitting diode is electrically connected to the multi-type TFT. The LTPS TFT and the oxide TFT are connected to the same gate line.

An LTPS-TFT structure comprises a gate, a gate dielectric layer, a patterned silicon layer, a patterned insulating layer, an ohmic contact layer and a source/drain layer. The gate and the gate dielectric layer are disposed on the substrate. The patterned silicon layer and the patterned insulating layer are disposed on the gate dielectric layer over the gate. The patterned silicon layer comprises a polysilicon channel region and an amorphous silicon hot carrier restrain region. The ohmic contact layer is disposed on a portion of the patterned silicon layer other than the polysilicon channel region and the amorphous silicon hot carrier restrain region and a portion of the patterned insulating layer over the amorphous silicon hot carrier restrain region. The source/drain layer is disposed on the ohmic contact layer and the gate dielectric layer.

One aspect of the present invention relates to a photovoltaic cell. In one embodiment, the photovoltaic cell includes a first conductive layer, an N-doped semiconductor layer formed on the first conductive layer, a first silicon layer formed on the N-doped semiconductor layer, a nanocrystalline silicon (nc-Si) layer formed on a first silicon layer, a second silicon layer formed on the nc-Si layer, a P-doped semiconductor layer on the second silicon layer, and a second conductive layer formed on the P-doped semiconductor layer, where one of the first silicon layer and the second silicon layer is formed of amorphous silicon, and the other of the first silicon layer and the second silicon layer formed of polycrystalline silicon.

A pixel structure of a full-color organic light-emitting diode (OLED) display device comprises a black matrix, a color changing medium, two thin film transistors, a storage capacitor, and an OLED device arranged on a substrate. The pixel structure of the display device uses blue organic light-emitting diodes or polymer light-emitting diodes as electroluminescent media. The low-temperature poly Si (LTPS) thin film transistors provide a current to the OLED device and serve as an active driving device. The color changing medium changes blue light into red or green light to form full-color OLED. The processing steps include the black matrix process, the island process, the gate process, the interlayer process, the color changing medium process, and the OLED deposition process. Because a color changing medium is integrated on the LTPS thin film transistors, this invention can make display devices of high resolution, high luminous efficiency and wide viewing angle.

A rare-earth-containing glass material has a composition, expressed in mole percentages on an oxide basis, comprising: SiO2 : 66-75 Al2O3 : 11-17 B2O3 : 0-4 MgO : 1-6.5 CaO : 2-7 SrO : 0-4 BaO : 0-4 Y2O3 : 0-4 La2O3 : 0-4 Y2O3+La2O3 : 0.1-4. The inclusion Of Y2O3 and/or La2O3 in the composition reduces the T2.3 of the glass thereby allowing higher annealing-point glasses to be produced. The glass is particularly useful for low-temperature polycrystalline silicon-based semiconductor devices.

The invention discloses a thin film transistor and an active matrix rear panel as well as manufacturing methods thereof and a display. The manufacturing method of the thin film transistor comprises a flow of preparing a first thin film transistor and a second thin film transistor, wherein the flow of simultaneously preparing a first active layer and a second active layer comprises the following steps of: forming an amorphous silicon active layer thin film and forming patterns including the first active layer and the second active layer through a pattern forming process; coating photoresist and forming a contact through hole above a partial region of the second active layer through an exposure and development process; forming an inductive metal thin film on the photoresist for forming the pattern and carrying out heat treatment; and then inducing the second active layer by the inductive metal thin film at the contact through hole to be subjected to transverse metal inductive crystallization, so as to crystallize an amorphous silicon material to a low-temperature polycrystalline silicon material; and stripping the photoresist and the inductive metal thin film on the photoresist. According to the invention, through a transverse metal inductive crystallization process, the active layers of the amorphous silicon TFT (Thin Film Transistor) and the low-temperature polycrystalline silicon TFT can be prepared on the same layer at the same time.

The present invention discloses a method for making polycrystalline silicon layer which comprises, providing a substrate, forming a breaker having a plurality of ditches on the substrate, forming a non-crystalline silicon layer on the breaker, proceeding a laser annealing process to form a polycrystalline silicon. The invention can be applied into the production of low-temperature polycrystalline silicon thin film transistor LCDs.

The invention provides an array substrate and a display panel. A driving circuit layer in the array substrate is formed on one side of a substrate, and the driving circuit layer comprises a low-temperature polycrystalline silicon thin film transistor and a low-temperature polycrystalline oxide thin film transistor which are electrically connected. The low-temperature polycrystalline silicon thin film transistor sequentially comprises a polycrystalline silicon active layer, a first grid electrode, a first source electrode and a first drain electrode in the direction away from the low-temperature polycrystalline silicon thin film transistor, and the low-temperature polycrystalline oxide thin film transistor sequentially comprises an oxide active layer, a second grid electrode, a second source electrode and a second drain electrode; a hydrogen barrier layer is formed on at least one side of the upper side or the lower side of the oxide active layer; a pixel electrode layer is formed on the side, away from the substrate, of the drive circuit layer, a pixel electrode is formed through patterning, and the pixel electrode is connected with the first source electrode or the first drain electrode. The hydrogen barrier layer can prevent hydrogen ions in other film layers from invading the oxide active layer to cause device characteristic drift, so that the performance of the transistorsis improved.

The invention discloses an array substrate and a manufacturing method thereof, and a display device. The array substrate comprises a substrate, wherein a first region and a second region of the substrate are respectively provided with a first transistor and a second transistor, the first transistor has a first active layer, the first active layer is low temperature polysilicon, the second transistor has a second active layer, the second active layer is metal-oxide semiconductor, the first active layer, an interlayer dielectric layer and the second active layer are sequentially arranged on the substrate, and a blocking layer is arranged between the interlayer dielectric layer and the second active layer. The array substrate is advantaged in that through arranging the blocking layer, the insulation and hydrogen blocking effect between the interlayer dielectric layer of the low temperature polysilicon film transistor and the active layer of the oxide film transistor is realized, hydrogen penetration in the subsequent heat treatment technology between the low temperature polysilicon film transistor and the oxide film transistor can be prevented, and bad influence of transistor characteristics of the low temperature polycrystalline silicon film transistor and the oxide film transistor can be prevented.

A method of forming a polysilicon thin film transistor that includes depositing an amorphous silicon layer over a substrate, crystallizing the amorphous silicon layer into a polycrystalline silicon layer, patterning the polycrystalline silicon layer to form a polysilicon active layer for a thin film transistor, depositing silicon oxide over the polysilicon active layer to form a gate insulation layer under a vacuum condition, applying heat to anneal the gate insulation layer under a vacuum condition and forming a gate electrode on the annealed gate insulation layer.

The invention discloses a manufacturing method of a low-temperature polycrystalline silicon (poly-Si) thin film transistor (TFT). The method is characterized by: forming an amorphous silicon (a-Si) layer on a substrate; carrying out hydrogen relief treatment on the a-Si layer so that the a-Si layer becomes a microgranular; then, forming the a-Si layer which does not be performed with grain refining on the a-Si layer of the microgranular; and then carrying out the hydrogen relief treatment on the a-Si layer so that the a-Si layer becomes the microgranular; and continuously repeating so as to form the a-Si layer and carrying out the hydrogen relief treatment so as to form the a-Si layer with multilayer micromeritics; finally, carrying out excimer laser annealing (ELA) so that the a-Si layer with the multilayer micromeritics crystallizes into a poly-Si layer. After the poly-Si layer becomes the a-Si layer of the multilayer micromeritic through pretreatment, the ELA is performed so that the crystalline grain of the poly-Si layer becomes larger and a carrier mobility is high.

An OLED device includes a low-temperature poly-silicon (LTPS) thin-film transistor having a first channel layer, a first gate electrode, a first source electrode and a first drain electrode; an oxide semiconductor thin-film transistor having a second channel layer, a second gate electrode, a second source electrode and a second drain electrode; and a functional layer between the first channel layer and the first gate electrode. The second channel layer is in contact with an upper surface of the functional layer.

The present invention provides a manufacturing method of a thin film transistor, an array substrate and a display device, relating to the technical field of display. The invention is used for solving the problems of large current, high power consumption of a low-temperature polysilicon thin film transistor. The thin film transistor comprises semiconductor layers comprising a first semiconductor layer and a second semiconductor layer, and the first semiconductor layer and the second semiconductor layer are laminated. The material of the first semiconductor layer is low-temperature polysilicon, and the carrier mobility of the second semiconductor layer is smaller than the carrier mobility of the first semiconductor layer. The above thin film transistor is used in the array substrate, and pixels are driven.

The invention discloses a low-temperature polycrystalline silicon thin-film transistor based on a dual-gate structure and a preparation method of the low-temperature polycrystalline silicon thin-film transistor with the dual-gate structure. The low-temperature polycrystalline silicon thin-film transistor comprises a substrate; at least one patterning amorphous silicon layer which is arranged in the barrier layer of the substrate and forms a bottom-gate; an N-channel metal oxide semiconductor which is arranged on the barrier layer; and a P-channel metal oxide semiconductor which is located on the barrier layer, wherein the patterning gate electrode layer formed by the N-channel metal oxide semiconductor and the bottom-gate formed by at least one patterning amorphous silicon layer are combined to form dual-gate structure, so that the current-voltage characteristic is more stable and the breakover current is improved obviously; the driving capacity is increased, the power consumption is reduced and the yield rate of products is improved.

A double-gate thin-film transistor and a method for forming the same, using low-temperature poly-silicon formed by direct deposition on a substrate so as to simplify the manufacturing process and improve the electrical characteristics. The double-gate thin-film transistor comprises: a first patterned electrode formed on a substrate; a first dielectric layer; a poly-silicon film, formed by direct deposition on the first dielectric layer so as to form between the poly-silicon film and the first dielectric layer an incubation layer comprising amorphous silicon; a pair of second patterned electrodes, formed on the poly-silicon film so as to define in the poly-silicon film and the incubation layer between the second patterned electrodes a channel region corresponding to the first patterned electrode; a second dielectric layer; and a third patterned electrode corresponding to the channel region. The method comprises steps of: providing a substrate, a first patterned electrode being formed on the substrate; forming a first dielectric layer; forming a poly-silicon film by direct deposition on the first dielectric layer so as to form between the poly-silicon film and the first dielectric layer an incubation layer comprising amorphous silicon; forming a pair of second patterned electrodes on the poly-silicon film so as to define in the poly-silicon film and the incubation layer between the second patterned electrodes a channel region corresponding to the first patterned electrode; forming a second dielectric layer; and forming a third patterned electrode corresponding to the channel region.

An integrated microfluidic device having a number of chambers (11-MN) for heating a fluid, a number of electrical heating elements (R) for heating different ones of the chambers, a controller for controlling the heating elements to vary a temperature of the fluid in the chambers repeatedly through a cycle of different temperatures, the controller being arranged to time the temperature cycle for a given one of the chambers to be out of phase with temperature cycles of others of the chambers. This can help reduce peak power consumption, and thus reduce unwanted voltage drops on supply lines. These can cause loss of precision in heating and sensing circuits. The device can comprise a low temperature polysilicon on a glass substrate. The controller can be coupled to the heating elements using an active matrix of control lines and switches (T2).

A plurality of thin film transistors provided in a peripheral region are first staggered thin film transistors where a first channel layer configured of low-temperature polysilicon is included, and the first channel layer is not interposed between a first source electrode and a first gate electrode, and between a first drain electrode and the first gate electrode. A plurality of thin film transistors provided in a display region are second staggered thin film transistors where a second channel layer configured of an oxide semiconductor is included, and the second channel layer is not interposed between a second source electrode and a second gate electrode, and between a second drain electrode and the second gate electrode. The first thin film transistor is located below the second thin film transistor.

The invention provides an array substrate, a display panel and a display device. The array substrate comprises a substrate body and first and second thin film transistors (TFT) thereon, and the activelayer material of the first TFT is different from that of the second TFT; the first TFT comprises the first active layer, a first gate, a first source and a first drain, and the first active layer isa low-temperature polycrystalline silicon layer; the second TFT comprises a second active layer, a second gate, a second source and a second drain; the first source, the first drain, the second source and the second drain are positioned in the same layer; and there is a first gate insulating layer between the first active layer and the first gate, and the second active layer is positioned in theslide, close to or far from the substrate, of the first gate insulating layer and does not make direct contact with the first gate insulating layer. Thus, the film layer on the array substrate can bereduced, and the first gate in the first TFT is avoided from influencing influence of the second TFT.

The embodiment of the invention provides a preparation method of a polycrystalline silicon thin film, a polycrystalline silicon thin film transistor and an array substrate and relates to the technical field of display. By means of the preparation method, polycrystalline silicon crystals are uniform, the grain size is increased, crystal quality is improved, and therefore the electrical properties of the thin film transistor are improved. The preparation method of the polycrystalline silicon thin film comprises the steps that an amorphous silicon thin film is formed on a substrate; the amorphous silicon thin film is treated through an excimer laser annealing method, so that the amorphous silicon thin film is crystallized into the polycrystalline silicon thin film. Furthermore, after the amorphous silicon thin film is formed and before the amorphous silicon thin film is treated though the excimer laser annealing method, the preparation method further comprises the steps that the surface of the amorphous silicon thin film is subjected to nickel salt solution treatment, so that a nickel salt solution is uniformly smeared on the surface of the amorphous silicon thin film. The method is used for preparation of the polycrystalline silicon thin film, the low-temperature polycrystalline silicon thin film transistor and the array substrate requiring that the uniformity of the polycrystalline silicon crystals is improved, the grain size is increased, and crystal quality is improved.