Production method for low-temperature polycrystalline silicon thin film
A technology of low-temperature polysilicon and its manufacturing method, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve problems such as large leakage current, affecting product quality, uneven surface of polysilicon layer 105, etc., to improve product quality, Effect of Reducing Leakage Current
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[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0021] A method for manufacturing a low-temperature polysilicon thin film provided in an embodiment of the present invention, such as figure 2 shown, including:
[0022] S201, sequentially depositing a buffer layer and an amorphous silicon layer on a substrate.
[0023] Specifically, such as image 3 As shown, a buffer layer 306 is deposited on the cleaned substrate 301, the buffer layer is composed of silicon nitride (SiN x ) layer 302 and silicon dioxide...
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