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A vacuum coating machine for nanomaterials

A vacuum coating machine and nano-material technology, applied in vacuum evaporation coating, metal material coating process, sputtering coating, etc., can solve the problems of low production efficiency, harmful gas, and pollution, and achieve simple structure and tightness Strong, good coating effect

Inactive Publication Date: 2017-08-04
GUANGDONG YINENG NANO SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The existing coating machine has the following defects: 1. The air tightness is not strong, which affects the vacuum effect, the vacuuming effect is not good, and the production efficiency is low; and it affects the coating effect, and the yield of the finished product is low; 2. The coating effect is poor, The film is easy to fall off from the product; 3. The equipment mechanism is responsible, and it is inconvenient to maintain; 4. It can only be applied to some metal coating materials, and it is easy to generate harmful gases

Method used

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  • A vacuum coating machine for nanomaterials
  • A vacuum coating machine for nanomaterials
  • A vacuum coating machine for nanomaterials

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Embodiment Construction

[0050] Attached below Figure 1 to Figure 12 , and specific embodiments will further illustrate the present invention.

[0051] Such as Figure 1 to Figure 2 As shown, a vacuum coating machine for nanomaterials includes an evaporation furnace 1 for evaporating coating materials into gas, a cracking furnace 2 for cracking gas, and a coating device for coating products, and the coating device includes a vacuum furnace 3. The vacuum pump 4 for evacuating the vacuum furnace 3 and the pressure pump 5 for pressurizing the vacuum furnace 3, the vacuum furnace 3 is connected with the vacuum pump 4 and the pressure pump 5 through pipelines respectively, and the evaporation furnace 1. The cracking furnace 2 and the vacuum furnace 3 are connected through pipelines, and a pneumatic valve 6 is also arranged between the cracking furnace 2 and the vacuum furnace 3 .

[0052] In this embodiment, the nano-coating material is put into the evaporation furnace 1 to evaporate into gas, and then ...

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Abstract

The present invention relates to the technical field of nano-coating equipment, in particular to a vacuum coating machine for nano-materials, including an evaporation furnace for evaporating coating materials into gas, a cracking furnace for cracking gas, and a coating device for coating products. The coating device includes a vacuum furnace, a vacuum pump for evacuating the vacuum furnace, and a pressure pump for pressurizing the vacuum furnace. The vacuum furnace is connected with the vacuum pump and the pressure pump through pipelines respectively. The furnace and the vacuum furnace are communicated by pipelines, and a pneumatic valve is also arranged between the cracking furnace and the vacuum furnace. The present invention has simple and compact structure, strong sealing performance, good coating effect, and the film is not suitable for falling off. Harmful gas will be produced.

Description

technical field [0001] The invention relates to the technical field of nano-coating equipment, in particular to a nano-material vacuum coating machine. Background technique [0002] Nano-waterproof coating technology is widely used in aerospace military industry, circuit boards, magnetic materials, sensors, silicone rubber, seals, medical equipment, precious cultural relics, small household appliances (soybean milk maker, rice cooker, induction cooker, razor, remote control, Air-conditioning fan, air conditioner, microwave oven, etc., audio), digital (mobile phone, camera, notebook, tablet, earphone,), bathroom, battery, automobile (electronic key, reversing radar, charging pile) and other fields; can be used in gold, silver, tungsten , cobalt, palladium and other metal surfaces form a coating with a thickness of about 2-10nm, so that the metal surface has good wear resistance, waterproof, electrical conductivity, corrosion resistance, high temperature resistance, oxidation ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/00C23C14/24
Inventor 肖桥兵
Owner GUANGDONG YINENG NANO SCI & TECH