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Carbon-material combined crucible for single-crystal furnace

A carbon material and single crystal furnace technology, applied in the field of crucibles, can solve the problem of difficult to remove the crucible bowl and quartz crucible residue, etc., and achieve the effects of good roundness, simple structure, and easy operation and use.

Inactive Publication Date: 2015-09-09
HUNAN NANFANG BOYUN NOVEL MATERIAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The bottom of the combined crucible and crucible bowl is a solid structure, and there is still the problem that it is difficult to remove the remnants of the quartz crucible at the bottom of the crucible bowl

Method used

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  • Carbon-material combined crucible for single-crystal furnace
  • Carbon-material combined crucible for single-crystal furnace

Examples

Experimental program
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Effect test

Embodiment 1

[0026] Such as figure 1 , 2 As shown, the combined crucible made of carbon material for single crystal furnace in this embodiment includes a combined crucible body made of carbon-carbon composite material and graphite material, and the combined crucible body includes a crucible cylinder 1, a crucible bowl 2, and a crucible holder 3. The crucible tube 1 is cylindrical, the bottom of the crucible bowl 2 is provided with a round hole, and the crucible bowl 2 is composed of two petal crucible bowl components; The hole is matched with the boss, and the boss is provided with a concave arc suitable for the quartz crucible. The crucible bowl 2 is assembled on the crucible holder 3, and the crucible cylinder 1 is assembled on the crucible bowl 2. The bottom end of the crucible cylinder and the crucible bowl Upper lap.

[0027] The crucible tube 1 and the crucible bowl 2 of the combined crucible in this embodiment are made of carbon-carbon composite material. The carbon-carbon composi...

Embodiment 2

[0034] The only difference between this embodiment and Embodiment 1 is that the crucible tube 1 and the crucible bowl 2 are made of carbon-carbon composite material, and its density is 1.5g / cm 3 The contact surface of the crucible tube 1 and the crucible bowl 2 is a conical surface fit, and its cone angle is 110°, and the height of the crucible tube 1 is 230mm; the overlapping height of the crucible tube 1 and the crucible bowl 2 is 30mm; The hole diameter is 420mm, and the gap between every petal of the crucible bowl 2 is 0.5mm.

[0035] The rest are the same as embodiment 1.

Embodiment 3

[0037] The only difference between this embodiment and Embodiment 1 is that the crucible tube 1 and the crucible bowl 2 are made of carbon-carbon composite material, and its density is 1.7g / cm 3 The contact surface of the crucible tube 1 and the crucible bowl 2 is a conical surface fit, and its cone angle is 100°, and the height of the crucible tube 1 is 150mm; the overlapping height of the crucible tube 1 and the crucible bowl 2 is 20mm; The hole diameter is 300mm, and the gap between each petal of the crucible bowl 2 is 0.5mm.

[0038] The rest are the same as embodiment 1.

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Abstract

A carbon-material combined crucible for a single-crystal furnace comprises a combined crucible body made of carbon-carbon composite or graphite materials. The combined crucible body comprises a crucible cylinder (1), a crucible bowl (2) and a crucible support (3). A circular hole is formed in the bottom of the crucible bowl (2). The crucible bowl (2) comprises at least two crucible bowl components. A boss matched with the bottom circular hole of the crucible bowl (2) is disposed on the middle of the crucible support (3). A concave arc matched with a quartz crucible is disposed on the boss. The crucible bowl (2) is assembled to the crucible support (3). The crucible cylinder (1) is assembled to the upper edge of the crucible bowl (2). The bottom end of the crucible cylinder (1) is in lap joint with the upper portion of the crucible bowl (2). The carbon-material combined crucible has the advantages that the combine crucible is simple in structure, convenient to operate, capable of effectively relieving damage of the residual quartz crucible on the combined crucible, good in roundness, stable, and high in whole bar rate and crystal forming rate during crystal pulling, and the service life of the combined crucible is prolonged.

Description

technical field [0001] The invention relates to a crucible, in particular to a carbon material composite crucible for a single crystal furnace. technical background [0002] At present, when a single crystal furnace draws a single crystal silicon rod, the quartz crucible containing polycrystalline silicon block and other raw materials is placed in the crucible on the crucible holder, heated and melted in a protective atmosphere, and after the process temperature is adjusted, the seed crystal is guided. The flow tube is inserted into the molten polysilicon liquid, and the crucible is placed on the crucible support and is driven by the crucible support shaft below to rotate together. At the same time, the seed crystal also rotates in the opposite direction and is lifted upward, so that the polysilicon liquid crystallizes and solidifies according to the silicon atom arrangement of the seed crystal. Monocrystalline silicon rods. During the pulling process of single crystal sili...

Claims

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Application Information

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IPC IPC(8): C30B15/10
Inventor 戴开瑛崔金张治军李猛
Owner HUNAN NANFANG BOYUN NOVEL MATERIAL