Cellular solid fluctuating micromechanical gyroscope and preparation method thereof

A micro-mechanical gyroscope and honeycomb-shaped technology, which can be used in gyroscope/steering sensing equipment, gyro effect for speed measurement, and microstructure devices without moving elements, etc. It can solve the problems of low sensitivity, poor impact resistance, and high precision. and other problems, to achieve the effect of good structural strength, strong stability and damage resistance, and small volume

Inactive Publication Date: 2015-09-09
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] This technology has the following disadvantages: the traditional spring-mass structure model is used, so the impact resistance is poor, the sensitivity is not high, the Q value is low, the zero drift is large, and it is difficult to achieve high precision.

Method used

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  • Cellular solid fluctuating micromechanical gyroscope and preparation method thereof
  • Cellular solid fluctuating micromechanical gyroscope and preparation method thereof
  • Cellular solid fluctuating micromechanical gyroscope and preparation method thereof

Examples

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Effect test

Embodiment 1

[0030] refer to figure 1 , the present embodiment provides a honeycomb hemispherical solid wave micromachined gyroscope, which includes:

[0031] a substrate 1 with an upper surface 4;

[0032] A honeycomb hemispherical resonator 3 placed on the base;

[0033] The supporting body 2 which is connected to the harmonic oscillator on the base and plays a supporting role;

[0034] And driving electrodes 5, detecting electrodes 6, monitoring electrodes 7, balancing electrodes 12, driving electrodes 11, detecting electrodes 10, monitoring electrodes 9, and balancing electrodes 8 located on the upper surface 4 of the substrate 1 and around the honeycomb resonator;

[0035] Wherein, the drive electrode, the detection electrode, the monitoring electrode, and the balance electrode are a pair, a total of eight, which are evenly distributed on the base around the honeycomb resonator, and the centers of the two electrodes are separated by 45°; the electrodes and the honeycomb There is a ...

Embodiment 2

[0047] Embodiment 2 is basically the same as Embodiment 1, except that the structure of the resonator is different. Embodiment 2 uses a honeycomb disk resonator.

[0048] refer to image 3 , the present embodiment provides a honeycomb hemispherical solid wave micromachined gyroscope, which includes:

[0049] A base 1 with an upper surface 4; a honeycomb disc resonator 3 placed on the base; a support body 2 on the base to connect the resonator and play a supporting role; and a honeycomb resonator located on the upper surface 4 Surrounding driving electrodes 5, detecting electrodes 6, monitoring electrodes 7, monitoring electrodes 9, and balancing electrodes 8.

[0050] Wherein, the drive electrode, the detection electrode, the monitoring electrode, and the balance electrode are a pair, a total of eight, which are evenly distributed on the base around the honeycomb resonator, and the centers of the two electrodes are separated by 45°; the electrodes and the honeycomb There is ...

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PUM

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Abstract

The invention provides a cellular solid fluctuating micromechanical gyroscope and a preparation method thereof. The gyroscope comprises a base, a cellular harmonic oscillator, a support body, a drive electrode, a detection electrode, a monitoring electrode and a balance electrode, wherein the cellular harmonic oscillator is arranged on the base; the support body is located on the base, is connected with the harmonic oscillator and plays a supporting role; the drive electrode, the detection electrode, the monitoring electrode and the balance electrode are located around the cellular harmonic oscillator; the inside of the cellular harmonic oscillator is of a honeycomb structure; the cross section of a structure unit of the honeycomb is a regular hexagon; every two adjacent units share the same wall; and the strength and the rigidity are adjusted by adjusting the aperture of a honeycomb core and the height of a core column. The cellular solid fluctuating micromechanical gyroscope has the advantages of simple structure, small size, impact resistance, light weight, high Q value and the like, and is relatively low in cost and suitable for preparation in a large quantity.

Description

technical field [0001] The invention relates to the technical field of microelectromechanical (MEMS) systems, in particular to the field of microelectromechanical gyroscopes, and relates to a honeycomb solid wave micromechanical gyroscope and a preparation method thereof. Background technique [0002] As a carrier angular velocity sensitive inertial sensor, gyroscope plays a very important role in attitude control, navigation and positioning in traditional industrial fields such as aviation, aerospace, and shipbuilding. MEMS micro-gyroscopes have the advantages of small size and mass, low power consumption, low cost, good environmental adaptability, and high integration. [0003] With the development of national defense technology and aviation and aerospace industries, the demand for MEMS micro-gyroscopes with high performance, small size and high reliability in the fields of military, industrial and consumer electronics is becoming increasingly urgent. The micro gyroscope ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5733B81B3/00B81C1/00
CPCG01C19/5733B81B1/002B81B3/00B81C1/00B81C1/005
Inventor 张卫平孙殿竣唐健刘亚东邢亚亮汪濙海陈文元
Owner SHANGHAI JIAO TONG UNIV
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