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Ultrapure mixed gas preparation system and method

A preparation system and mixed gas technology, applied in the direction of mixing methods, chemical instruments and methods, mixers, etc., can solve the problems affecting the purity of ultra-pure mixed gas and the accuracy of gas distribution, the amount of raw material gas and the increase in time cost, etc. Achieve the effect of reducing impact, reducing consumption and time cost, and increasing air supply pressure

Active Publication Date: 2017-03-22
PERIC SPECIAL GASES CO LTD
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  • Claims
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Problems solved by technology

If the ultra-pure raw gas is stored, it is easy to introduce nitrogen, oxygen, water, carbon dioxide and other gas impurities during the gas storage process, which will affect the purity of the ultra-pure mixed gas and the accuracy of gas distribution, resulting in an increase in the amount and time cost of the prepared raw gas

Method used

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  • Ultrapure mixed gas preparation system and method

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Embodiment 1

[0069] Such as figure 1 As shown, the ultra-pure mixed gas preparation system includes: container III 1, purifier III 2, buffer bottle III 3, pressure reducing valve I 4, diaphragm valve I 5, one-way valve I 6, vent port 7, and gas cylinder Filling pipeline 8, gas chromatograph with PDD detector 9, trace oxygen analyzer 10, trace water analyzer 11, particle counter 12, gas chromatograph with TCD detector 13, cryogenic liquid storage tank II 14, vaporizer II 15. Diaphragm compressor II 16, purifier II 17, buffer bottle II 18, pressure reducing valve II 19, diaphragm valve II 20, check valve II 21.

[0070] The connection relationship is: container III 1, purifier III 2, buffer bottle III 3, pressure reducing valve I 4, diaphragm valve I 5, check valve I 6 connected in sequence, cryogenic liquid storage tank II 14, vaporizer II 15 , diaphragm compressor II 16, purifier II 17, buffer bottle II 18, pressure reducing valve II 19, diaphragm valve II 20, and check valve II 21 are co...

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Abstract

The invention discloses a system and method for preparing ultra-pure mixed gas, belonging to the technical field of gas preparation. The system includes: a component gas supply unit, a dilution gas supply unit, a mixed gas preparation unit, an analysis unit, a gas cylinder and a balance; the mixed gas preparation unit is connected with the component gas supply unit, the dilution gas supply unit, The gas cylinder is connected, and the analysis unit is connected to the component gas supply unit and the dilution gas supply unit respectively. The present invention also provides a method using the ultra-pure mixed gas preparation system, the steps are as follows: Step 1, gas purification and inspection; Step 2, mixed gas filling; Step 3, mixed gas quality inspection. The system of the present invention is used for gas distribution. After the raw material gas is purified into ultra-pure gas by a purifier, the ultra-pure mixed gas is immediately prepared without filling. This can reduce the consumption of raw gas and save the time of gas distribution while ensuring the purity of the mixed gas and the accuracy of gas distribution.

Description

technical field [0001] The invention relates to a system and method for preparing ultrapure mixed gas, belonging to the technical field of gas preparation. Background technique [0002] The extremely large-scale integrated circuits of modern semiconductor factories require a large amount of ultra-pure (purity greater than 99.9999%) electronic mixed gas, which has very high requirements for the purity of the mixed gas and the accuracy of gas distribution, which not only requires high purity of the raw material gas, but also It also puts forward higher requirements for the gas filling technology. [0003] At present, in the method of high-pressure static preparation of bottled mixed gas, the weighing method is the most accurate method recognized at home and abroad. The weighing method is an absolute method based on "mass" measurement. Since this method does not need to accurately measure the temperature and pressure of the gas, and does not need to use the gas compression fac...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01F3/02B01F3/20B01F15/02B01F15/04B01F15/06B01F23/10B01F23/70
Inventor 李晓昆闫云刘晓林董云峰黄国庆代伟娜陈欢杨品石晶
Owner PERIC SPECIAL GASES CO LTD
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