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Controllable flexible transfer method of two-dimensional materials

A technology of two-dimensional materials and transfer methods, which is applied in the field of two-dimensional material transfer, can solve the problems of random distribution, poor strength, and small area of ​​thin-layer two-dimensional materials, and achieve the effects of good compatibility, small impact and strong versatility

Inactive Publication Date: 2015-10-07
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the main preparation methods of two-dimensional materials are mechanical exfoliation method, chemical vapor deposition method and chemical redox method, among which mechanical exfoliation method is the best method for making two-dimensional material samples when studying basic condensed matter physics problems and making high-performance micro-nano devices. The main method, compared with other methods, can produce high-quality single-crystal thin-layer two-dimensional materials, but due to the small area and random distribution of thin-layer two-dimensional materials obtained by mechanical exfoliation, further experimental research and Wiener devices There are considerable limitations in manufacturing. In addition, the composite structure of different materials is also a research direction to improve the performance of materials and develop the functions of Wiener devices. However, some thin-film materials have very poor strength when used as target substrates, and cannot be fixed by traditional graphene. Transfer method [invention patent: a graphene selective fixed-point transfer method, publication number: 103435036A] realized

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] SiO 2 The mechanically exfoliated molybdenum disulfide thin film sample on the / Si substrate is accurately transferred to a small hole on a silicon nitride film and covers the small hole without destroying the silicon nitride film, including the following steps:

[0043] 1) Place the molybdenum disulfide sample obtained by mechanical exfoliation on SiO 2 / Si substrate, and then look for and select the required target two-dimensional material samples under the microscope, as shown in the attached image 3 Shown; the selected sample is a double-layer molybdenum disulfide flake, and its plane size is a parallelogram with a length of 8 μm and a width of 7 μm; SiO 2 The thickness is 280nm;

[0044] 2) On SiO loaded with the desired target 2D material sample 2 / Si substrate is coated with polypropylene carbonate glue solution, the concentration of polypropylene carbonate glue is 0.125g / ml, and solvent is acetone;

[0045] 3) Stand still, wait for 3 hours, until the aceton...

Embodiment 2

[0053] The difference between this embodiment and embodiment 1 is that in step 1), the size of the molybdenum disulfide sheet can also be any size from 1 μm×1 μm to 10mm×10mm; 2 The thickness can also be 200nm, 400nm, 500nm or 600nm and so on. Others are the same as in Example 1.

Embodiment 3

[0055] The difference between this embodiment and embodiment 1 is: in step 2), the concentration of polypropylene carbonate glue is 0.2g / ml etc.; Others are the same as embodiment 1.

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Abstract

The invention discloses a controllable flexible transfer method of two-dimensional materials. The controllable flexible transfer method includes the steps: adopting a mechanical striping method or other methods to obtain a target two-dimensional material to be transferred; spraying polypropylene carbonate glue on the surface of the two-dimensional material; standing and heating to solidify the polypropylene carbonate glue to enable the two-dimensional material to be adhered below a formed polypropylene carbonate thin film; mounting the thin film on a micro manipulator carrying a polydimethylsiloxane buffering layer, and accurately aligning the thin film to a target position of a target substrate with the help of an optical microscope; heating to melt the polypropylene carbonate thin film, and using organic solvent to remove residual polypropylene carbonate. By the controllable flexible transfer method, accurate and controllable transfer of the two-dimensional material is realized. The method is simple in process, high in efficiency, wide in application range and high in expandability and has wide using prospect in the fields of microelectronics, biological detection and batteries.

Description

technical field [0001] The invention belongs to the technical field of materials, and relates to a method for transferring two-dimensional materials, in particular to a method for transferring two-dimensional materials with small local stress and capable of precise positioning. Background technique [0002] Commonly used two-dimensional materials include graphene, molybdenum disulfide, tungsten disulfide, etc. After the successful preparation of graphene, the research and application of two-dimensional materials have developed rapidly in recent years, and have been widely used in the fields of microelectronics, biological detection and batteries Wide application prospects. At present, the main preparation methods of two-dimensional materials are mechanical exfoliation method, chemical vapor deposition method and chemical redox method, among which mechanical exfoliation method is the best method for making two-dimensional material samples when studying basic condensed matter ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B32B18/00B32B9/04
Inventor 陈云飞倪振华邹益人袁志山赵伟玮伍根生徐伟司伟沙菁洁刘磊
Owner SOUTHEAST UNIV
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