Deplating method for magnetic control sputtering graphite carbon film

A technology of magnetron sputtering and graphitic carbon, which is applied in the field of surface treatment to achieve efficient removal, high practical value, and anti-corrosion effects

Active Publication Date: 2015-11-25
CSIC NO 12 RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to overcome the defects of the above-mentioned prior art, the object of the present invention is to provide a method for deplating a magnetron sputtering graphite carbon film, and the magnetron sputtering graphite coating defective products and the magnetron sputtering graphite carbon film that cannot be continued to be used The re-plating of graphite-coated workpieces can achieve the purpose of safely and efficiently removing the existing graphite-like carbon film without damaging the substrate, so that it can be used again, which has high practical value

Method used

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  • Deplating method for magnetic control sputtering graphite carbon film

Examples

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Effect test

Embodiment 1

[0029] The substrate material is stainless steel, and the magnetron sputtering graphite carbon film test piece is used for deplating. Take 1L of distilled water, add 50g of alkali sodium hydroxide, 10g of sodium carbonate, stir evenly, and add surfactant dodecane to the above solution. Alcohol amide 10g, after stirring evenly, add 8g of anticorrosion complexing agent ammonium tripolyphosphonate and 2g of corrosion inhibitor adenosine diphosphonate, and immerse the substrate of the formed magnetron sputtering graphite-like carbon film in a 70°C In the deplating solution, and use the deplating solution as the electrolyte, electrolyze with a DC voltage of 9V, and the electrolysis time is 15 minutes. There is no coating on the surface and no damage to the base material.

Embodiment 2

[0031] Select the scrapped magnetron sputtering graphite carbon film gear as the test piece, the film thickness is 2-7um, take 1L of distilled water, add 100g of alkali sodium hydroxide, 10g of sodium carbonate, stir well, add surface active Agent lauryl alcohol amide 10g / l, after stirring evenly, add anticorrosion complexing agent ammonium tripolyphosphonate 8g and corrosion inhibitor adenosine diphosphonate 2g respectively, the substrate of the formed magnetron sputtering graphite-like carbon film Immerse in the deplating solution at 70°C, and use the deplating solution as the electrolyte, and perform electrolysis with a DC voltage of 9V. After the electrolysis time is 8 minutes, the deplating is completed. The deplating effect of this process is good, and the substrate is not damaged. Can be reused, saving costs.

Embodiment 3

[0033] The substrate material is stainless steel, and the magnetron sputtering graphite carbon film test piece is used for deplating. Take 1L of distilled water, add 100g of alkali sodium hydroxide, 10g of sodium carbonate, stir evenly, and add surfactant dodecane to the above solution. Alcohol amide 10g, after stirring evenly, add 8g of anticorrosion complexing agent ammonium tripolyphosphonate and corrosion inhibitor adenosine diphosphonate 2g respectively, and immerse the substrate of the formed magnetron sputtering graphite-like carbon film in a 70°C In the deplating solution, and use the deplating solution as the electrolyte, electrolyze with a DC voltage of 12V. After the electrolysis time is 6 minutes, the deplating is completed. The stainless steel test piece is taken out and cleaned. no damage.

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Abstract

The invention provides a deplating method for a magnetic control sputtering graphite carbon film. According to the deplating method, 1 L of distilled water is taken, 10-200 g of sodium hydroxide and 5-50 g of sodium carbonate are added to be stirred evenly, 5-20 g of surfactant dodecyl alcohol amine is added to the obtained solution to be evenly stirred, and 3-15 g of antiseptic complexing agent trimerization ammonium phosphate and 1-4 g of corrosion inhibitor adenosine diphosphate are added into the mixture; a formed substrate of the magnetic control sputtering graphite carbon film is soaked in deplating liquid at the temperature of 50 DEG C to 90 DEG C, the deplating liquid serves as electrolyte, electrolysis is conducted at the direct-current voltage of 3.5 V to 12 V, the electrolysis time ranges from 5 minutes to 30 minutes, the magnetron sputtering graphite carbon film is removed, the deplated substrate is washed and dried, and the deplating process is completed. The method is efficient and good in stability and has higher practical value.

Description

technical field [0001] The invention relates to the technical field of surface treatment, in particular to a deplating method of a magnetron sputtering graphite-like carbon film. Background technique [0002] The magnetron sputtering graphite-like carbon film process is widely used in the industrial field. In the process of coating the workpiece, due to the unstrict control of process conditions and other reasons, the coated film layer does not meet the quality requirements, resulting in defective products. In order to save costs, it is necessary to de-coat the defective product and re-coat the workpiece. At the same time, due to the long-term use of the film on the surface of the workpiece, the graphite-like carbon film is severely worn, and the quality of the film cannot meet the technical requirements. In order to reduce losses and save costs, it is necessary to remove the coating and let the workpiece be reworked to rework the graphite-like carbon film. It is an importa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25F3/02
Inventor 陈喜锋王佐平刘海涛魏刚张镜斌
Owner CSIC NO 12 RES INST
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