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Plating method for laser high-reflective film

A high-reflection film and laser technology, applied in the field of vacuum coating, can solve the problems that cannot directly reflect the strength of the mirror against laser damage, the damage threshold of the reflective film, etc., to achieve no wavelength drift, increase the damage threshold, and reduce absorption Effect

Inactive Publication Date: 2015-12-09
HEBEI HANGUANG HEAVY IND
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  • Abstract
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Problems solved by technology

However, the high reflectivity level does not directly reflect the strength of the mirror against laser damage, that is, the damage threshold of the laser high reflective film

Method used

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  • Plating method for laser high-reflective film
  • Plating method for laser high-reflective film
  • Plating method for laser high-reflective film

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Embodiment Construction

[0026] The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0027] The invention includes two parts: the preparation of the mixed film material and the plating process of the laser high reflection film, and the difficulty of the plating process is greatly reduced by using the mixed film material.

[0028] (1) Membrane material preparation and testing

[0029] 1. Select three commonly used high-refractive index elemental thin film materials:

[0030] TiO 2 The refractive index is between 2.2-2.7, and the refractive index depends strongly on the plating method and substrate temperature, but its compactness is average, and the laser damage threshold is low.

[0031] Ta 2 o 5 The refractive index is between 2-2.2, but the film layer is extremely dense, the filling density tends to be 1, and the laser destruction threshold is slightly higher than that of TiO2.

[0032] ZrO 2 The refractive index is between 1.9-2.1...

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Abstract

The invention discloses a plating method for a laser high-reflective film. Multiple commonly-used simple-substance film materials with high refractive indexes are mixed according to a certain proportion, and the mixed film materials are adopted for plating of a laser reflective film, so that the damage resistance threshold and the reflectivity of the laser reflective film are greatly improved. According to the laser reflective film formed by plating with such a series of mixed film materials as high-refractive-index materials and with SiO2 as a low-refractive-index film material, the damage resistance threshold is increased by 15%; the absorption is reduced; the mechanical strength is increased; and no wavelength drafting phenomenon is generated.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a method for coating a laser high reflection film. Background technique [0002] At present, the highest reflectivity of the laser cavity mirror reported internationally can reach 99.999%, which is prepared by ion beam sputtering deposition technology. Using this technology, it is easy to prepare a reflectivity greater than 99.99%, and the loss is lower than 4.0×10 The -6 all-dielectric reflective coating is mainly used in the development of laser gyroscopes and high-power laser cavity mirrors. However, the high reflectivity level does not directly reflect the strength of the mirror against laser damage, that is, the damage threshold of the laser high reflection film. Contents of the invention [0003] In view of this, the present invention provides a method for coating a high-reflection laser film, and the anti-damage threshold and reflectivity of the laser reflective ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32
Inventor 惠建平魏春刚李永庆
Owner HEBEI HANGUANG HEAVY IND
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