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Electron beam continuous stepless adjustment device based on convergence point axial position control, its adjustment method and application

PendingCN122091456Aeliminate vibrationeliminate wear and tearElectric discharge tubesOptical axisOptic system
This invention provides a continuous stepless adjustment device, method, and application for electron beam based on the axial position control of the convergence point, belonging to the field of electron optics adjustment technology. The invention includes an anode body, an anode aperture, an electromagnetic focusing unit, and a fixed single-aperture main aperture, coaxially arranged along the electron beam propagation direction within the lens barrel of an electron optics system. This invention uses the axial position of the electron beam's convergence point relative to the fixed single-aperture main aperture as the control degree of freedom. The electromagnetic focusing unit continuously adjusts the displacement of the convergence point along the optical axis, achieving continuous stepless adjustment of the electron beam. By completely eliminating the mechanical moving parts of the aperture, this invention not only achieves continuous and smooth adjustment of the electron beam but also fundamentally avoids the vibration, contamination, and failure risks caused by mechanical movement. This significantly improves the reliability, repeatability, and long-term stability of the electron optics system, while simplifying the system structure and reducing manufacturing and maintenance costs.
Owner:NCS-MICRO BEAMS (BEIJING) CO LTD