A tail gas vacuum acid removal filter for a decompression diffusion furnace

A diffusion furnace and filter technology, which is applied in the fields of dispersed particle filtration, dispersed particle separation, chemical instruments and methods, etc., can solve the problem of inability to apply decompression diffusion exhaust gas treatment, weak corrosion resistance, and unsuitable decompression diffusion exhaust gas treatment. and other problems, to achieve the effect of avoiding exhaust gas corrosion, preventing exhaust gas corrosion and simple structure

Active Publication Date: 2017-06-13
HUNAN RED SUN PHOTOELECTRICITY SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

There is no vacuum filter specially designed for acid removal in the prior art, and the existing filters are generally not suitable for the requirements of decompression and diffusion tail gas treatment, and ordinary vacuum filters cannot be applied due to their weak corrosion resistance. Decompression diffusion tail gas treatment technology

Method used

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  • A tail gas vacuum acid removal filter for a decompression diffusion furnace
  • A tail gas vacuum acid removal filter for a decompression diffusion furnace

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Embodiment Construction

[0023] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

[0024] Such as figure 1 As shown, the tail gas vacuum deacidification filter for the decompression diffusion furnace of the present embodiment includes a sealed filter cylinder 13 and an air inlet pipe 1 and an air outlet pipe 8 respectively arranged at both ends of the filter cylinder 13, and the air outlet of the air inlet pipe 1 end is communicated with the filter cylinder 13, the air inlet end of the air outlet pipe 8 is communicated with the filter cylinder 13, the filter cylinder 13 is filled with adsorbent 11 for acid removal, and the outlet end of the air inlet pipe 1 is provided with multiple The ventilation holes 10 of the air outlet of the trachea 1, the air inlet end of the outlet pipe 8 is provided with a plurality of ventilation holes 10 for the air inlet of the outlet pipe 8, and the particle diameter of the adsorbent 1...

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Abstract

The invention discloses a tail gas vacuum deacidification filter for a decompression diffusion furnace, which comprises a sealed filter cylinder body and an air inlet pipe and an air outlet pipe separately arranged at both ends of the filter cylinder body, and the air outlet end of the air inlet pipe communicates with the filter cylinder body , the inlet end of the air outlet pipe is connected with the filter cylinder, and the filter cylinder is filled with adsorbents for acid removal. There are a plurality of ventilation holes for the air intake of the outlet pipe, and the particle size of the adsorbent is larger than that of the ventilation holes. The invention has the advantages of good sealing performance and good corrosion resistance, and can effectively remove metaphosphoric acid in the tail gas of a decompression diffusion furnace.

Description

technical field [0001] The invention relates to tail gas treatment equipment for a decompression diffusion furnace, in particular to a vacuum deacidification filter for tail gas used for a decompression diffusion furnace. Background technique [0002] At present, decompression diffusion technology has been used as an advanced technical means in the diffusion process of silicon wafers. Due to the decompression diffusion can significantly improve the sheet resistance, and still has good uniformity under high square resistance, it improves the gas The efficiency of use, increase production capacity, so it has a very broad prospect. Due to the decompression diffusion furnace body (that is, the diffusion furnace is one of the important process equipment in the front process of the semiconductor production line, it is used for diffusion, oxidation and annealing in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and op...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01D46/24B01D53/04
Inventor 肖洁李明符慧能
Owner HUNAN RED SUN PHOTOELECTRICITY SCI & TECH
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