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Device for manufacturing microstructure through focal field trajectory based on dynamic control

A micro-nano structure and dynamic technology, applied in optical components, optics, instruments, etc., can solve the problems of complex movement control of samples, low processing efficiency, etc., and achieve the effects of high repeatability, improved efficiency, and mature technology.

Inactive Publication Date: 2016-01-20
NANKAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the invention is to solve the problem of complex movement control of the sample and low processing efficiency during femtosecond laser micro-nano processing, and to provide a device and device for efficient processing of complex micro-nano structures based on dynamic control of femtosecond vector light field arrays. method

Method used

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  • Device for manufacturing microstructure through focal field trajectory based on dynamic control
  • Device for manufacturing microstructure through focal field trajectory based on dynamic control
  • Device for manufacturing microstructure through focal field trajectory based on dynamic control

Examples

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Embodiment 1

[0027] Embodiment 1. A device for making a microstructure based on a dynamically regulated focal field trajectory

[0028] Such as figure 1As shown, the device for fabricating microstructures using a dynamically regulated femtosecond vector light field array proposed by the present invention includes: a femtosecond laser, a dynamic femtosecond vector light field array generation and regulation system, and a tight-focus micromachining system.

[0029] The generation and control system of the dynamic femtosecond vector light field array includes: a spatial light modulator (4), a 4f system front lens (5), a spatial filter (6), and a 1 / 4 wave plate arranged in sequence along the optical axis (7), 4f system rear lens (8), Ronchi grating (9) and computer system (14) for producing and dynamically controlling the holographic grating. The tightly focused microprocessing system includes: a microscope objective lens (11), a sample (12) and a three-dimensional mobile platform (13).

[0...

Embodiment 2

[0031] Embodiment 2. The principle and method of making microstructures using dynamically regulated femtosecond vector light field arrays

[0032] After the femtosecond laser passes through the generation and control system of the dynamic femtosecond vector light field array described in Example 1, it is incident on the microscope objective lens for focusing, and then incident on the surface or inside of the sample for micro-nano processing, and the prepared micro-nano structure The shape or shape of is determined by the focal spot trajectory of the dynamic vector light field tightly focusing the focal field. The principle of micro-nano-fabrication based on the dynamic vector light field array will be introduced in detail below.

[0033] Such as figure 2 As shown in (a), the vector light field array is composed of a series of single vector light fields arranged according to certain rules. The polarization distribution of each vector light field can be adjusted independently,...

example 1

[0047] The following describes in detail the processing of regular hexagonal and regular quadrilateral microstructures inside z-cut lithium niobate crystals in combination with the processing device for making complex microstructures based on the dynamically regulated focal field trajectory of the present invention.

[0048] Processing device reference figure 1 , after the incident femtosecond laser passes through the spatial light modulator and 4f system, based on the principle of wavefront reconstruction, the vector light field is generated by combining the beams of the Ronchi grating. Unlike the generation of a single vector light field, in order to obtain the vector light field array, in The holographic grating loaded on the spatial light modulator is also an array type, the grating has the same period and orientation, and the arrangement mode of the holographic grating has the same arrangement as the vector light field array to be generated (see figure 2 (a) shown). Whe...

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Abstract

A device for manufacturing a microstructure through a focal field trajectory based on dynamic control. The device comprises a femtosecond laser, a dynamic femtosecond vector light field array generation and control system and a tightly-focused micromachining system. According to the working principle, a holographic grating is loaded on a spatial light modulator for generating a vector light field array, and a tightly-focused field with the specific light intensity distribution is obtained through focusing of a microscope objective. The dynamic-changing vector light field array is obtained by designing dynamic-changing holographic grating, and a focal field trajectory in the special shape such as a quadrangle, an octagon, a fan blade shape and the like and changing along with time can be generated after tight focusing is performed. On the basis of the generated focal field trajectory, the microstructure corresponding to the focal field trajectory can be obtained on the basis of the generated focal field trajectory. Compared with other methods for manufacturing micro nanometer structures, the device has the unique advantage that samples or light sources do not need to move, the manufactured microstructure is close to the wavelength magnitude, the two-dimensional / three-dimensional structure of any design can be machined, and the advantages of being efficient, high in repeatability, good in stability and the like are achieved when the microstructure is manufactured.

Description

technical field [0001] The invention belongs to the fields of light field polarization control and femtosecond laser micro-nano processing, and specifically relates to a device and method for controlling a focal field trajectory by using a dynamically regulated femtosecond vector light field array and performing micro-nano processing based thereon. Background technique: [0002] In the past ten years, with the continuous development of femtosecond laser technology, the application of femtosecond laser micro-nano processing has become more and more extensive. With its inherent ultra-short and super-strong characteristics, femtosecond laser has many incomparable unique advantages in micro-processing compared with traditional long-pulse lasers: non-thermal fusion of the processing process, accuracy of processing degree, sub-micron processing size Characteristics, wide range of processing materials, etc., so it is widely used to process metals, semiconductors and dielectric mate...

Claims

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Application Information

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IPC IPC(8): G02B27/42G02B27/28
CPCG02B27/283G02B27/4233
Inventor 涂成厚蔡孟强李萍萍潘岳李勇男王慧田
Owner NANKAI UNIV
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