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An evaporation machine

An evaporation machine and evaporation technology, applied in the field of evaporation machines, can solve problems such as material loss, achieve the effect of reducing energy loss and maintaining the original rate

Active Publication Date: 2018-04-20
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a vapor deposition machine to solve the technical problem of material loss if the current vapor deposition rate is maintained when the vapor deposition of the existing vapor deposition machine is interrupted

Method used

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Embodiment Construction

[0024] The following descriptions of the various embodiments refer to the accompanying drawings to illustrate specific embodiments in which the present invention can be practiced. The directional terms mentioned in the present invention, such as "up", "down", "front", "back", "left", "right", "inside", "outside", "side", etc., are for reference only The orientation of the attached schema. Therefore, the directional terms used are used to illustrate and understand the present invention, but not to limit the present invention. In the figures, structurally similar units are denoted by the same reference numerals.

[0025] Please refer to figure 2 , figure 2 It is a structural schematic diagram of the vapor deposition machine of the present invention.

[0026] The evaporation machine of the present invention includes: an evaporation source group, a gas channel, and a valve group;

[0027] The evaporation source group includes at least two evaporation sources, the evaporatio...

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Abstract

The present invention provides an evaporation machine, which includes: an evaporation source group, including at least two evaporation sources; a gas channel, including a common gas channel and at least two sub-gas channels, and a valve group, including a common valve and at least two Each sub-valve is correspondingly provided with a sub-valve, and the common valve is used to control the conduction or non-conduction of the common gas passage; the sub-valve is used to control the corresponding sub-valve The conduction or non-conduction of the gas channel. In the evaporation machine of the present invention, at least one evaporation source is added, and one of them is selected for evaporation. When the evaporation is interrupted, the material evaporated by the evaporation source of the evaporation is deposited in the remaining evaporation sources. When the evaporation is resumed, While maintaining the original rate, energy consumption can be reduced.

Description

【Technical field】 [0001] The invention relates to the technical field of liquid crystal displays, in particular to an evaporation machine. 【Background technique】 [0002] Compared with the current mainstream liquid crystal display technology, organic light-emitting diode (OLED) display technology has the advantages of high contrast, wide color gamut, flexibility, thinness, and energy saving. In recent years, OLED display technology has gradually become popular in mobile devices such as smartphones and tablets, flexible wearable devices such as smart watches, large-size curved TVs, and white lighting, and has a strong momentum of development. [0003] OLED technology mainly includes small molecule OLED technology based on vacuum evaporation technology and polymer OLED technology based on solution process. The evaporation machine is the main equipment for the production of small molecule OLED devices that have been mass-produced at present. The core part of the equipment is t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24
Inventor 沐俊应
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD