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Dynode film structure and electron multiplier based on dynode film structure

A technology of electron multiplier and thin-film structure, which is applied in the manufacture of circuits, electrical components, and cold cathodes. It can solve problems such as low process consistency, uneven sample surface, and insufficient performance of process materials, and achieve high secondary electron emission. coefficient, good attenuation characteristics, effects of stable chemical features

Inactive Publication Date: 2016-02-24
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Oxidation and sputtering both have their defects in technology or insufficient material properties.
For example, the process consistency of the oxidation method is not high, and the sputtering method is easy to form an uneven sample surface when preparing a curved surface structure, and the material can only be selected from traditional metal oxides or other non-metallic materials.

Method used

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  • Dynode film structure and electron multiplier based on dynode film structure
  • Dynode film structure and electron multiplier based on dynode film structure
  • Dynode film structure and electron multiplier based on dynode film structure

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Embodiment Construction

[0024] The present invention is described in further detail below in conjunction with accompanying drawing:

[0025] The dynode film structure of the present invention is a layer of diamond film 110 grown on the curved dynode sheet 100 by MPCVD.

[0026] The electron multiplier of the present invention includes a base frame body 130, a grid electrode 150 and an arc-shaped dynode piece 100; the base frame body 130 is a quarter cylindrical structure, wherein the base frame body 130 It includes a bottom plate, a first side plate and a second side plate, the first side plate and the second side plate are respectively connected to the two sides of the bottom plate, the arc-shaped dynode piece 100 is fixed on the upper part of the bottom plate, and the arc-shaped dynode The upper surface of the sheet 100 and the upper surface of the bottom plate are concave arc surfaces, and a layer of diamond film 110 is grown on the upper surface of the arc-shaped dynode sheet 100 by MPCVD, and th...

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Abstract

The invention discloses a dynode film structure and an electron multiplier based on the dynode film structure. A diamond film dynode for the electron multiplier comprises a base frame box, an arc-shaped secondary electron dynode piece, a clamping base plate and a gate electrode. The base frame box is used for storing and fixing the arc-shaped secondary electron dynode piece. The arc-shaped secondary electron dynode piece is formed by growing a diamond film having high secondary electron emission efficiency on the inner side of an arc-shaped surface of a metal sheet of an arc-shaped metal substrate through the microwave plasma chemical vapor deposition (MPCVD) method. The secondary electron dynode piece and the base frame box are tightly fixed together through the clamping base plate. The grate electrode has the effect of accelerating incident electrons. The dynode film structure and the electron multiplier based on the dynode film structure have the characteristics that the secondary electron emission coefficient is high, the secondary emission coefficient reduction performance is excellent, and the structure of the film is stable; in addition, the dynode base frame box of the electron multiplier can be installed extremely conveniently, and the original properties of the film cannot be damaged. The dynode film structure and the electron multiplier based on the dynode film structure have the advantages of being low in manufacturing cost, simple in structure and high in working performance.

Description

technical field [0001] The invention belongs to the field of signal processing equipment, and in particular relates to a dynode film structure and an electron multiplier based on the dynode film structure. Background technique [0002] An electron multiplier is a conversion device that converts a weak electrical signal into a measurable electrical signal. It is an electronically sensitive plate, which emits a large number of secondary electrons after being impacted by high-energy electrons, thereby causing a cascade amplification effect. [0003] refer to figure 1 , the primary electrons are vertically incident on the grid of the first-stage dynode, and the energy of the primary electrons is continuously increased under the action of the electric field of the grid, and pass through the grid to bombard the inner surface of the first-stage dynode, generating more secondary electrons secondary electrons. [0004] Usually, the dynode is usually prepared by copper-beryllium al...

Claims

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Application Information

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IPC IPC(8): C23C16/511C23C16/27H01J9/02
CPCH01J9/027C23C16/274
Inventor 吴胜利魏强魏孔庭张劲涛胡文波
Owner XI AN JIAOTONG UNIV
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