A dual-grating coaxial focusing device and focusing method based on labview

Abstract

A dual-grating coaxial focus detection device and focus detection method based on LabVIEW, mainly composed of a LabVIEW-based light field intensity detection and focus detection control system, a displacement platform system, a double-grating system, a system under test, a detection module, and a power supply. Composition, the device structure includes light source, collimating lens, first focusing lens, frosted glass, reflector, second focusing lens, first grating plate, second grating, CCD and computer; use the light field intensity detection and focus inspection based on LabVIEW The control system software performs data processing on the fringe pattern collected by the CCD and calculates the power spectrum. When the data processing and analysis of the second grating plate reaches the focus position, the relevant data is displayed, marked and stored on the computer, so as to achieve the automatic focus detection function. The focus detection method of the present invention has fast detection speed and high precision; simple structure and convenient operation; the software displays the power spectrum of the currently detected data in real time and draws corresponding dynamic curves, which is convenient for data storage and expanded application.

Description

technical field [0001] The invention relates to an automatic focusing device of an optical system, in particular to a double-grating coaxial focusing device and a focusing method based on LabVIEW. Background technique [0002] Biomedical photonics is a science that uses photons to study life phenomena. It is a marginal subject that is produced by the intersecting and interpenetrating of photonics and life sciences. Biomedical photonics mainly studies cell function and structure at the molecular level. Its application in medicine is mainly to detect changes in tissue structure and function by detecting human tissue and blood parameters, and then realize non-destructive detection and diagnosis of diseases at the macro and micro levels. and treatment. For example, in the in vivo imaging of the human retina, adaptive optics technology is used to compensate for the aberrations of the human optical system in real time, and high-resolution images of visual cells and fundus microve...

AI Technical Summary

Problems solved by technology

[0003] At present, the high-precision optical system focus detection device usually adopts the off-axis method. When the numerical aperture or size of the optical system under test is small, it is difficult to perform a good focus detection.

The existing focus detection device is mainly used in the focus detection of the optical system in the IC manufacturing industry, which is expensive and complicated to operate, and is not suitable for the focus detection of the biomedical optical system.

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