Method for carrying out metal bonding on LED lighting emitting component
A technology for metal bonding and light-emitting components, applied in electrical components, electrical solid-state devices, semiconductor devices, etc., can solve the problems of high cost, yield loss, complex process, etc., achieve high bonding yield, reduce costs, and reduce bonding Effect of Metal Layer Thickness
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Embodiment 1
[0022] Experiments show that the flatter the bonding layer metal is, the more fully the metal atoms are mixed and diffused during the bonding process, and the bonding surfaces are tightly connected. The rougher the bonding layer metal is, the bonding surface cannot be tightly connected due to fine holes in some areas during the bonding process; To achieve a good bonding effect, a flat bonding surface is required.
[0023] Such as figure 1 As shown, for an LED light-emitting component, it includes a GaAs substrate 1 and an epitaxial layer arranged on the back of the substrate. The epitaxial layer includes an N-type cladding layer 2, a light-emitting layer 3, and a P-type cladding layer 4 in order from top to bottom; The mirror system 5 below the epitaxial layer, the first metal bonding layer 6 , the second metal bonding layer 7 and the Si substrate 8 are arranged in sequence below the mirror system 5 .
[0024] The method for metal bonding of the LED light-emitting component i...
experiment example 1
[0027] Select the vacuum degree of starting plating as 3E-06torr; the evaporation thickness is At the evaporation temperature of 50-70°C, the influence of different evaporation rates on the surface roughness RMS and bonding yield was investigated. The results are as follows: Figure 4 and figure 2 shown.
[0028] according to figure 2 As shown in the curve, as the evaporation rate increases, the RMS value of the surface roughness decreases, and the corresponding bonding yield is higher.
experiment example 2
[0030] Choose the evaporation rate as The evaporation thickness is At the evaporation temperature of 50-70°C, the effects of different starting vacuum degrees on the surface roughness RMS and bonding yield were investigated. The results are as follows: Figure 5 and figure 2 shown.
[0031] according to image 3 As shown in the curve, the RMS value of the surface roughness decreases with the decrease of the starting vacuum plating. When the starting vacuum degree is 3-5E-06torr, the surface roughness RMS reaches the best, and the corresponding bonding yield is higher.
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