Methods of performing spectroscopy in transmission charged particle microscopy
A charged particle microscope, a technology for charged particles, applied in the field of spectroscopy, which can solve the problems of bulky, expensive dual EELS technology, prone to failure beam blankers, etc.
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Embodiment 1
[0077] figure 1 It is a highly schematic description of an embodiment of TCPM M, which is suitable for use with the present invention; the microscope depicted is TEM / STEM (ie TEM with scanning function), but for example in the context of the present invention, It can only properly be an ion-based microscope. In this figure, in the vacuum enclosure 2, an electron source 4 (for example, such as a Schottky gun) generates an electron beam, which passes through to guide / focus it to a sample P (which can be (partially), for example, Thinning / planarization) on the selected part of the electro-optical illuminator 6. This illuminator 6 has an electronic optical axis 8, and will generally include various electrostatic lenses / magnetic lenses, (scanning) deflectors, correctors (such as de-astigmatizers), etc.; typically, it may also include a condenser System (the entire project 6 is sometimes referred to as the "concentrator system").
[0078] The sample P is clamped on a sample holder 1...
Embodiment 2
[0099] image 3 An example of EELS spectrum is shown. This figure presents the intensity I (in arbitrary units, a.u.) as a function of the energy loss E (in eV) of electrons that have passed through a sample containing carbon and titanium. From left to right, the main characteristics of the spectrum are:
[0100] -Zero-loss peak ZLP, which represents electrons that have not experienced inelastic scattering and passed through the sample;
[0101] -Plasmon resonance peak component / segment PRP (sometimes called valence loss component). This usually extends from about 0-50 eV, but its upper limit is not strictly defined. It is characterized by peaks / shoulders, such as peak 31, produced by scattering events from the outer shell in the sample. Note that the PRP component often has a significantly lower intensity than ZLP.
[0102] -Core loss peak component / segment CLP. This typically starts at about 50 eV (after the PRP component), but its lower limit is not strictly defined. It usua...
Embodiment 3
[0104] The resolution of the EELS module can be limited by many effects, such as Poisson noise (or "shot noise") in the electron beam, detector readout noise, energy divergence of the electron source, optical aberration of the EELS module, and EELS module The limited spatial resolution of the detector, electrical instability in the power supply used, mechanical vibration, etc. As a result, the "ideal" or "real" EELS spectrum S real (E) Recorded as experimental spectrum S by EELS module exp (E):
[0105] S exp (E) = R(E)*S real (E)+N(E),
[0106] Where R(E) represents the (cumulative) widening effect, N(E) represents the (cumulative) noise, and the asterisk ("*") represents convolution:
[0107] R(E)*S real (E) = ʃ R(F) S real (E-F) dF.
[0108] In the absence of samples, the ideal spectrum contains only the ZLP peak, and therefore the ideal spectrum can be written as a delta function, S real (E) = δ(E); In that case, the recorded spectrum is simplified to:
[0109] S exp (E) ...
PUM
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