Preparation method for flexible LED array based on inorganic semiconductor material

Abstract

The invention discloses a preparation method for a flexible LED array based on an inorganic semiconductor material. The preparation method comprises the steps of growing an LED epitaxial wafer with a sacrificial layer on a semiconductor substrate, forming annularly-patterned photoresist mask by photoetching, and etching until reaching the lower contact layer of the LED epitaxial wafer; manufacturing a side passivating layer through a photoetching process; forming a patterned metal pattern, and forming ohmic contact after performing annealing and alloying; etching an annular low table surface and exposing the sacrificial layer; etching the sacrificial layer for a certain length; spin coating a flexible polymer material; etching a polymer material covering an inner ring and the upward side of partial metal electrode to expose partial metal electrode for preparing metal interconnection; performing metal sputtering and patterning processing for preparing LED unit interconnection; spin coating the flexible polymer material; exposing the inner ring sacrificial layer; etching the residual sacrificial layer; peeling off the inorganic LED array coated with the flexible polymer; and completing the preparation for the inorganic LED array.

Description

technical field [0001] The invention belongs to the field of semiconductor optoelectronic device technology and nanometer material technology, and specifically relates to a method for preparing a flexible LED array based on an inorganic semiconductor material and an organic flexible substrate. Background technique [0002] A new type of flexible inorganic integrated device based on inorganic semiconductor materials and organic flexible substrates is a perfect combination of flexible substrates and traditional inorganic semiconductor technologies; compared with conventional organic flexible LEDs, it has the following advantages: high brightness, long life, and high stability , high efficiency; both flexible advantages; these advantages of inorganic flexible LEDs make them widely used in medical health and daily life; including: micro flexible LEDs can be made into health monitors or imaging instruments that wrap patients like blankets; As a light source for photodynamic thera...

AI Technical Summary

Problems solved by technology

Inorganic LEDs have the advantages of high energy efficiency, long life, and good stability. The preparation of inorganic flexible LEDs avoids the above problems, but Wiener processing technology has higher requirements, and the preparation process is relatively complicated.

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