Unlock instant, AI-driven research and patent intelligence for your innovation.

A measurement method using a wavelength-corrected multi-beam angle stepped mirror laser interferometer

A technology of laser interferometer and measurement method, applied in the direction of using optical devices, measurement devices, instruments, etc., can solve the problems of limited measurement accuracy and difficult to improve measurement accuracy.

Active Publication Date: 2018-02-06
上海吉江数据技术有限公司
View PDF7 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to overcome the shortcomings of existing laser interferometers that the measurement accuracy is limited by the laser wavelength and the measurement accuracy is difficult to improve, and to provide a wavelength-corrected multi-beam angle stepped mirror laser interferometer and its measurement method. On the basis of the existing Michelson laser interferometer, the measurement accuracy can reach Improving the measurement accuracy of the laser interferometer

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A measurement method using a wavelength-corrected multi-beam angle stepped mirror laser interferometer
  • A measurement method using a wavelength-corrected multi-beam angle stepped mirror laser interferometer
  • A measurement method using a wavelength-corrected multi-beam angle stepped mirror laser interferometer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 2

[0076] like figure 1 , 4 As shown, as the laser interferometer described in Embodiment 1, the precision displacement device 6 includes a support platform 8 and a driving device 9 arranged on the support platform 8, and the support platform 8 and the measured object 12 In cooperation, the driving device 9 provides the measuring corner mirror 7 with displacement in the displacement direction of the measured object 12 , and the driving device 9 is a piezoelectric ceramic driving device.

[0077] In this embodiment, the piezoelectric ceramic driving device 9 used is a functional ceramic material capable of converting mechanical energy and electrical energy, and its deformation under the action of an electric field is very small, at most no more than one ten-millionth of its size The small displacement of 1 has good reciprocating deformation recovery ability, good stability and high precision, which further improves the precision of the precision displacement device 6 in this embo...

Embodiment 3

[0079] like figure 1 , 4 As shown, like the laser interferometer described in Embodiment 2, the precision displacement device 6 further includes a first displacement member 13 arranged on the support platform 8 and a second displacement member 13 arranged on the first displacement member 13. The displacement member 14, the driving device 9 cooperates with the first displacement member 13, provides the displacement along the support platform 8 for the first displacement member 13, and the first displacement member 13 has a The inclined surface 15 with an inclined displacement direction, the second displacement member 14 is slidably arranged on the inclined surface 15 of the first displacement member 13, so that the second displacement member 14 can slide along the inclined surface 15 of the first displacement member 13 , the first displacement member 13 is closely fitted with the second displacement member 14, the measuring angle mirror 7 is arranged on the second displacement...

Embodiment 4

[0083] like Figure 4 As shown, as in the laser interferometer described in Embodiment 3, a magnetic member 11 with magnetism is also provided between the first displacement member 13 and the support platform 8, and the second displacement member 14 is magnetic, so The second displacement member 14 and the magnetic member 11 are in a state of opposite sex attraction, and the second displacement member 14 and the measuring angle reflector 7 are in an integrated structure. When the first displacement member 13 is pushed, the measuring angle reflector 7 can keep in close contact with the second displacement member 14 to ensure the precision of the precision displacement device 6 of the present application, thereby ensuring the measurement accuracy of the laser interferometer of the present application. The two displacement parts 14 and the measuring angle reflector 7 are of an integral structure, that is to say, a reflective surface is directly arranged on the second displacement...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a wavelength-corrected multi-beam angle stepped mirror laser interferometer, which includes a laser source, a beam splitter, a fixed stepped plane angle mirror, a measuring angle reflecting mirror device, and a photoelectric detector group, wherein the measuring angle reflecting mirror device It includes a measuring angle reflector and a precision displacement device. The laser source includes n parallel laser beams, n≥2. The photodetector group includes n photodetection devices. The reflection surface of the fixed step plane angle reflector is n step planes. The distance between two adjacent reflective planes is (k is a natural number); a beam of laser light after the action of the beam splitter is injected into one of the reflective planes and then reflected to a photodetector, while another beam of laser light transmitted through the beam splitter passes through the measurement angle After being reflected by the reflector and the beam splitter, it is also incident on the photodetector. The laser interference phenomenon produced by the laser interferometer is not only related to the laser wavelength, but also related to the height difference of the stepped reflection plane. The photodetector group can detect the displacement with an accuracy of λ / 2n level. The wavelength correction method obtains the environmental equivalent wavelength, which significantly improves the measurement accuracy.

Description

technical field [0001] The invention relates to the field of precision testing technology and instruments, in particular to a wavelength-corrected multi-beam angle stepped reflector laser interferometer and a measurement method thereof. Background technique [0002] The emergence of lasers has enabled the rapid development of ancient interferometric technology. Lasers have the characteristics of high brightness, good directionality, monochromaticity and good coherence. Laser interferometry technology has been relatively mature. Laser interferometry system is widely used: measurement of precision length and angle, such as detection of linear scale, grating, gauge block, and precision screw; positioning detection system in precision instruments, such as control and correction of precision machinery; special purpose for large-scale integrated circuits Positioning detection systems in equipment and testing instruments; measurement of tiny dimensions, etc. In most laser interfer...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02G01B11/02
CPCG01B9/02018G01B9/02075G01B11/02
Inventor 许诚昕徐承成李运洪刘俊张白
Owner 上海吉江数据技术有限公司