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Preparation method of silicon tetrafluoride complex and equipment used therefor

A technology of silicon tetrafluoride and complex compound, applied in the field of silicon isotope separation, can solve the problems of decreased performance and lifespan of semiconductor components, increased calorific value, and increased temperature, and achieves complete reaction, low water content, and complex degree of high effect

Inactive Publication Date: 2019-01-04
BOHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the smaller the volume of the semiconductor chip, the higher the circuit integration, the current density will gradually increase, and the heat generated per unit volume will increase, which will cause the temperature of the components to rise during operation. Excessive chip temperature will lead to poor performance of semiconductor components. and life expectancy are greatly reduced

Method used

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  • Preparation method of silicon tetrafluoride complex and equipment used therefor

Examples

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preparation example Construction

[0021] As shown in the figure, the preparation method of the silicon tetrafluoride complex comprises the following steps.

[0022] (1) Dehydration of the complexing agent: the complexing agent enters from the bottom of the dehydration tower filled with molecular sieves, flows out from the top, and is collected into an anhydrous complexing agent storage tank; the moisture content in the complexing agent is reduced to below 50ppm; the complexing agent It is one of carbon alcohols such as methanol, ethanol or n-propanol.

[0023] (2) Complexation reaction: add anhydrous complexing agent to the complexation reaction tower from the top; silicon tetrafluoride gas is added to the complexation reaction tower from the bottom; collect the silicon tetrafluoride complex to the complex storage tank, Detect the degree of complexation; the degree of complexation is about 100% qualified, if the degree of complexation is too low, the complex is sent to the complexation reaction tower for react...

Embodiment 1

[0026] In this example, methanol was used as complexing agent, and SiF 4 Gas reaction to prepare silicon tetrafluoride methanol complex.

[0027] The specific process is as follows.

[0028] 1. Start the complexing agent delivery pump 2 to drive methanol from the complexing agent storage tank 1 into the dehydration tower 3. After dehydration, enter the anhydrous complexing agent storage tank 4 for storage, and detect the water content of the anhydrous complexing agent. If it is lower than 50ppm, it is Qualified, if it is higher than this value, then the complexing agent in the anhydrous complexing agent storage tank 4 is re-injected into the dehydration tower 3 for dehydration until it is qualified.

[0029] 2. Before the reaction, the entire complexation reaction tower system needs to be vacuumized. When the pressure gauge reading is stable at a value close to -0.1Mpa, stop vacuuming and keep the vacuum.

[0030] 3. SiF with a purity higher than 99.99% 4 The gas is passed ...

Embodiment 2

[0034] In this example, ethanol was used as complexing agent, and SiF 4 Gas reaction to prepare silicon tetrafluoride ethanol complex.

[0035] The specific process is as follows.

[0036] The reaction conditions of the preparation process keep the temperature of the complex at the bottom of the tower at 0° C. and the pressure of the pressure gauge at the bottom of the tower at about 0.25 MPa.

[0037] All the other operating steps are the same as in Example 1.

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Abstract

The invention discloses a preparation method and equipment of a silicon tetrafluoride complex. The preparation method includes (1) entering the complexing agent from the bottom of a dehydration tower filled with molecular sieves, flowing out from the top, and collecting it into an anhydrous complexing agent storage tank; The moisture content in the complexing agent is reduced to below 50ppm; (2) Add the anhydrous complexing agent to the complexation reaction tower from the top; silicon tetrafluoride gas is added to the complexation reaction tower from the bottom; collect the silicon tetrafluoride complex to the complex storage tank. The equipment includes complexing agent storage tank (1), complexing agent delivery pump (2), dehydration tower (3), anhydrous complexing agent storage tank (4), anhydrous complexing agent delivery pump (5), SiF4 steel cylinder (6), complexation reaction tower (7), complex storage tank (8) and vacuum pump (9). The invention has the characteristics of easy control, no pollution and complete reaction, and the prepared silicon tetrafluoride complex has high complexation degree and extremely low water content.

Description

technical field [0001] The present invention relates to the field of silicon isotope separation in the modern electronics and semiconductor industry, in particular to a preparation method and equipment for a silicon tetrafluoride complex, which is suitable for preparing a silicon tetrafluoride complex and provides for subsequent silicon isotope separation raw material. Background technique [0002] In modern electronics and semiconductor industries, silicon materials have been widely used, and more than 90% of semiconductor components are made of silicon. Natural silicon contains three stable isotopes 28 Si, 29 Si, 30 Si, its content is respectively 92.23%, 4.67%, 3.10%. In recent years, isotopically pure silicon materials have begun to attract the attention of scientists due to their excellent properties. [0003] With the development of modern information industry and electronic computer industry, the volume of semiconductor chips has become smaller and more integrate...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C07F7/12
CPCC07F7/126
Inventor 唐克钱建华刘琳赵刚王力霞
Owner BOHAI UNIV
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