Method for determining microfluid channel conductivity

A technology of a microfluidic channel and a determination method, applied in the micro-nano field, can solve the problem of not having a mature detection method, and achieve the effects of low manufacturing process difficulty, less detection time, and simple detection process operation.

Active Publication Date: 2016-05-04
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] At present, people have obtained a variety of processing methods for processing microfluidic channels of various scales, but how to detect and judge the conduction performance of the processed microfluidic channels, there is not yet a mature detection method

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  • Method for determining microfluid channel conductivity
  • Method for determining microfluid channel conductivity
  • Method for determining microfluid channel conductivity

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Embodiment Construction

[0033] figure 1 It is a schematic diagram of the sample to be tested according to one embodiment of the present invention, which includes a microfluidic channel 1, a substrate 2 and a storage bin 3. In one embodiment of the present invention, the microfluidic channel 1 is a metal tungsten tubular nanochannel, The substrate 2 is a silicon substrate. It can be understood that according to experimental requirements, different materials can be selected as the substrate, microfluidic channel and storage chamber, and the cross section of the microfluidic channel can also be rectangular or elliptical.

[0034] In one embodiment of the present invention, the method for determining the conductivity of the microfluidic channel may include the following steps:

[0035] Step 1: Fix the sample including the microfluidic channel 1 and the substrate 2 on the sample stage of the focused ion beam / scanning electron microscope dual-beam system (FIB / SEM);

[0036] Step 2: using focused ion beam ...

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Abstract

The invention discloses a method for determining microfluid channel conductivity, belonging to the micro-nano field. The method comprises steps of filling a tracking reagent in a microfluid channel and performing cooling solidification, adopting a focused ion beam etching technology to obtain cross sections at different positions inside the microfluid channel, and observing the cross section of the microfluid channel through a high-resolution scanning electronic microscope to determine the conductivity of the microfluid channel.The invention lowers the manufacture technology difficulty, reduces the detection time, simplifies the detection process, and improves the flexibility and accuracy through the interception of the cross section and high resolution imaging of the scanning electronic microscopic.The invention is an appropriate method for determining microfluid channel conductivity.

Description

technical field [0001] The invention relates to the micro-nano field, in particular to a method for determining the conductivity of a microfluidic channel. Background technique [0002] In recent years, microfluidic technology, which can perform complex and precise manipulations of microfluids (including liquids and gases), has developed rapidly. Microfluidic channels have played a unique role in the fields of chemistry, medicine, and life sciences due to their advantages such as light and small volume, small amount of samples / reagents used, fast reaction speed, a large number of parallel processing, and disposable. [0003] At present, people have obtained a variety of processing methods for processing microfluidic channels of various scales, but how to detect and judge the conduction performance of the processed microfluidic channels, there is not yet a mature detection method. [0004] Therefore, the present invention provides a method for detecting and judging the condu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M13/00
CPCG01M13/00
Inventor 李无瑕李俊杰金凌顾长志
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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