Characteristic analysis method for capacitive micromachined ultrasonic transducer

A capacitive micromechanical and ultrasonic sensor technology, applied in the fields of instruments, electrical digital data processing, special data processing applications, etc., can solve the problems of inability to analyze, time-consuming calculation process, and inability to analyze the nonlinear characteristics of CMUT micro-elements.

Active Publication Date: 2016-05-04
ZHONGBEI UNIV
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Problems solved by technology

At present, there are many methods for analyzing the characteristics of CMUT microelements. The commonly used analysis models include equivalent circuit model, finite element analysis model, and finite difference model. However, these methods have some shortcomings: (1) For the equivalent circuit model, At present, only the analysis methods for small signals are relatively mature; (2) The finite element analysis model usually uses professional finite element analysis softw

Method used

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  • Characteristic analysis method for capacitive micromachined ultrasonic transducer
  • Characteristic analysis method for capacitive micromachined ultrasonic transducer
  • Characteristic analysis method for capacitive micromachined ultrasonic transducer

Examples

Experimental program
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Effect test

Embodiment 1

[0069] Embodiment 1: the inventive method is:

[0070] (1) Use MATLAB software to establish the CMUT microelement transmitting or receiving state equation-SIMULINK model, such as figure 2 and 5 shown;

[0071] (2) According to the structural parameters and material properties of the selected CMUT, use MATLAB software to calculate and determine the parameter values ​​of equivalent mass M, equivalent elastic coefficient K and equivalent resistance coefficient R in the centralized parameter system model, and put the corresponding The calculated value is input into the state equation-SIMULINK model;

[0072] (3) When the CMUT is in the transmitting state:

[0073] For the nonlinear module (Electrostaticforce), only need to determine the driving voltage V, the vacuum dielectric constant ε 0 , electrode effective area A, initial distance g between the upper and lower electrodes 0 And the displacement and other parameters, the electrostatic force F can be calculated by the corr...

Embodiment 2

[0078] Example 2: CMUTV AC When the emission characteristics are small, the specific analysis steps are as follows:

[0079] (1) Use MATLAB software to establish the CMUT microelement emission state equation-SIMULINK model, such as figure 2 shown;

[0080] (2) According to the structural parameters and material properties of the selected CMUT, use MATLAB software to calculate and determine the parameter values ​​of equivalent mass M, equivalent elastic coefficient K and equivalent resistance coefficient R in the centralized parameter system model, and put the corresponding The calculated value is input into the state equation-SIMULINK model;

[0081] (3) For a specific AC signal with a small amplitude, to analyze the influence of DC bias voltages with different amplitudes on the emission characteristics of the CMUT, it is only necessary to set V according to formula (1-13) IN , respectively input DC bias voltages of different amplitudes into the state equation-SIMULINK mod...

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Abstract

The invention provides a characteristic analysis method for a capacitive micromachined ultrasonic transducer (CMUT), which aims at performing effective analysis on displacement, acceleration, sound pressure characteristics and receiving characteristics under the circumstances of different emission signals. The characteristic analysis method for the CMUT comprises the step: firstly establishing an infinitesimal state equation SIMULINK model of the CMUT in an emission state and an infinitesimal state equation SIMULINK model of the CMUT in a receiving state, wherein the infinitesimal state equation SIMULINK model of the CMUT in the emission state comprises a CMUT vibration system module and an electrostatic force module, and the infinitesimal state equation SIMULINK model of the CMUT in the receiving state comprises a CMUT vibration system module, an electrostatic force module and a current output module; the electrostatic force module calculates an electrostatic force Fe by determining parameters, such as driving voltage V, an initial gap g0 between an upper electrode and a lower electrode, and displacement; by determining parameters, such as the electrostatic force Fe, equivalent mass, equivalent spring constant K and equivalent impedance R, the CMUT vibration system module establishes a lumped parameter system, calculates vibration displacement and vibration velocity, and outputs the displacement as feedback quantity to the electrostatic force module, thereby multiplying vibration velocity and radiation resistance to calculate sound radiation pressure.

Description

technical field [0001] The invention relates to a characteristic analysis method of a capacitive micromachined ultrasonic sensor. Background technique [0002] Ultrasonic imaging technology has been widely used in many fields such as medical ultrasonic diagnosis, medical ultrasonic therapy, nondestructive testing, ultrasonic microscope and marine topography detection, and ultrasonic sensor is one of the key components to realize ultrasonic imaging. Capacitive micromachined ultrasonic transducer (CMUT) is a new type of ultrasonic transducer based on the electrostatic energy conversion mechanism. Compared with piezoelectric ultrasonic transducers, it has many advantages: (1) It has lower acoustic impedance and does not require The complex impedance matching layer is easy to match the impedance of air, water, human tissue and other media. (2) It has a wider bandwidth. (3) The array design is flexible, and has good consistency, repeatability and high precision. (4) It is easy...

Claims

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Application Information

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IPC IPC(8): G06F17/50
CPCG06F30/367
Inventor 王红亮何常德薛晨阳王朝杰崔娟
Owner ZHONGBEI UNIV
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