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Method for isolating and producing enriched 28Si, 29Si and 30Si by serially connected multiple towers and apparatus used by method

An enrichment and obtained technology, applied in separation methods, chemical instruments and methods, dispersed particle separation, etc., to achieve the effect of improving separation efficiency, reducing difficulty, and reducing height

Inactive Publication Date: 2016-06-15
BOHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, there is no mature industrial production line for silicon isotope separation at home and abroad

Method used

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  • Method for isolating and producing enriched 28Si, 29Si and 30Si by serially connected multiple towers and apparatus used by method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] In this embodiment, both the first chemical exchange system and the second chemical exchange system use ethanol as complexing agent, SiF 4 A separation system is formed between the gas and the silicon tetrafluoride ethanol complex.

[0047] The specific process is as follows.

[0048] In the first chemical exchange system, SiF 4 The gas enters from the bottom of the first complexing tower 1, and reacts with the ethanol sprayed down from the top of the tower at 0-10°C and 0.1-0.2Mpa (absolute pressure) to form a silicon tetrafluoride ethanol complex, which is formed by the second The process at the bottom of a complexing tower 1 enters the buffer tank 15; then the SiF that is sprayed down and flows from bottom to top is pumped to the top of the first chemical exchange tower assembly 2 by a pump 16 4 The gas undergoes a chemical exchange reaction at 5~10°C and 0.1~0.2Mpa (absolute pressure); the silicon tetrafluoride ethanol complex flowing out of the first chemical exc...

Embodiment 2

[0051] In this embodiment, the first chemical exchange system uses methanol as a complexing agent, and the second chemical exchange system uses n-propanol as a complexing agent. In the two systems, SiF 4 Separate systems are formed between the gas and the silicon tetrafluoride methanol complex and the silicon tetrafluoride n-propanol complex.

[0052] The specific process is as follows.

[0053] In the first chemical exchange system, SiF 4 The gas enters from the bottom of the first complexing tower 1, and reacts with the methanol sprayed down from the top of the tower at 5~15°C and 0.1~0.2Mpa (absolute pressure) to form a silicon tetrafluoride ethanol complex. The process at the bottom of a complexing tower 1 enters the buffer tank; then the pump 16 hits the top of the first chemical exchange tower assembly 2, which is sprayed down and flows from bottom to top. 4 The gas undergoes a chemical exchange reaction at 10~15°C and 0.1~0.2Mpa (absolute pressure); the silicon tetraf...

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Abstract

The invention belongs to the field of silicon isotope isolation in modern electronics and semiconductor industry and particularly relates to a method for isolating and producing enriched 28Si, 29Si and 30Si by serially connected multiple towers and an apparatus used by the method.The production steps include as follows: (1), reacting SiF4 with a complexing agent to produce a complex; (2), subjecting the complex to chemical exchange reaction with SiF4 gas; (3), subjecting the complex to splitting reaction; removing the complexing agent from produced SiF4 gas, and charging it into a first chemical exchange tower assembly; returning produced complexing agent to a first complexing tower; (4), conveying gaseous enriched 29Si and 30Si on the top of the first complexing tower to a second chemical exchange tower assembly, and subjecting them to chemical exchange reaction with the complex; (5), conveying the complex to a second splitting tower for splitting reaction.Silicon isotope isolation abundance is high, isolation efficiency is ideal, and the height of each single unit can be effectively reduced.

Description

technical field [0001] The invention belongs to the field of silicon isotope separation in modern electronics and semiconductor industry, especially a kind of multi-tower serial separation production enrichment 28 Si, 29 Si and 30 The Si method and device provide raw materials for the preparation of isotopically pure new silicon materials. Background technique [0002] In modern electronics and semiconductor industries, silicon materials have been widely used, and more than 90% of semiconductor components are made of silicon. Natural silicon contains three stable isotopes 28 Si, 29 Si, 30 Si, its content is respectively 92.23%, 4.67%, 3.10%. In recent years, isotopically pure silicon materials have begun to attract the attention of scientists due to their excellent properties. [0003] With the development of modern information industry and electronic computer industry, the volume of semiconductor chips has become smaller and more integrated. However, the smaller the...

Claims

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Application Information

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IPC IPC(8): B01D59/28
CPCB01D59/28
Inventor 唐克钱建华刘琳邢锦娟许家胜
Owner BOHAI UNIV
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