Black phosphorus/graphene heterostructure-based ultraviolet detector and production method thereof
An ultraviolet detector, heterostructure technology, applied in semiconductor devices, final product manufacturing, sustainable manufacturing/processing, etc., can solve problems affecting device performance, oxygen defects, etc., to improve device performance, improve stability, improve The effect of speed of response
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[0032] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but should not be used to limit the scope of the present invention.
[0033] figure 1 Be a kind of ultraviolet detector based on black phosphorus / graphene heterostructure of a preferred embodiment of the present invention; Described a kind of ultraviolet detector based on black phosphorus / graphene heterostructure comprises substrate 5, insulation Layer 4, black phosphorus / graphene heterostructure 1 and source electrode 6, drain electrode 7 and gate power supply 8, wherein,
[0034] The black phosphorus / graphene heterostructure 1 is formed by stacking black phosphorus 2 and graphene 3, and the black phosphorus 2 is a two-dimensional layered material located on the insulating layer 4;
[0035] The insulating layer 4 covers the substrate 5, and the material is silicon dioxide; ...
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