Optimizing the Properties of Transparent Conductive Thin Films by Ultrasonic Transducer Coupled with Laser Irradiation

A transparent conductive film, laser irradiation technology, applied in circuits, electrical components, semiconductor devices, etc., can solve the problems of harsh conditions, small performance optimization parameter range, etc., to achieve easy operation, widen the parameter range, and reduce laser irradiation conditions. Effect
CN105762233BActive Publication Date: 2017-09-05东台城东科技创业园管理有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
东台城东科技创业园管理有限公司
Publication Date
2017-09-05

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Abstract

The invention relates to the field of laser surface treatment and thin-film material preparation, especially relates to a method for optimizing transparent conducting thin film performance by utilizing a cooperation of ultrasonic transduction and ultrashort-pulse laser irradiation. The method comprises the steps: a transparent conducting thin film is arranged on the surface of an ultrasonic transducer, the laser irradiation is performed on the transparent conducting thin film, at the same time, the ultrasonic transducer vibrates in a direction vertical to laser irradiation, so that the transparent conducting thin film vibrates in small amplitude and high frequency along the surface in a normal direction, a distance between the thin film surface and a laser focus is periodically changed in a small way, a laser parameter range for optimizing transparent conducting thin film performance is extended, and the surface of the thin film is easy to have an anneal function; the surface of the transparent conducting thin film absorbs laser energy and melts, the energy generated by the vibration can ensure the thin film fusion field to generate a core in solidification process in advance, add crystal cores and refine crystal particles, so that the density of the thin film is increased, the surface microstructure of the thin film is improved, and the thin film performance optimization is realized at last.
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Description

technical field

[0001] The invention relates to the field of laser surface treatment and thin film material preparation, in particular to a method for optimizing the performance of transparent conductive thin films by utilizing ultrasonic energy conversion and ultrashort pulse laser irradiation, which can be applied to SnO 2 , ZnO, In 2 o 3 Transparent conductive film materials of its doping system (such as FTO, AZO, ITO). Background technique

[0002] In the field of thin-film solar cells, the transparent conductive film as the front electrode of the battery undertakes the dual functions of conduction and light transmission. In order to obtain more excellent optical and electrical properties of transparent conductive films to meet the needs of practical applications, the surface optimization of various transparent conductive films prepared by traditional processes has attracted more and more attention.

[0003] At present, there are many methods to optimize the optical a...

Claims

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