A Measuring Method for Alternate Incremental Measuring Micro Displacement Sensor

A technology of micro-displacement sensor and displacement sensor, which is applied in the direction of measuring devices, instruments, optical devices, etc., can solve the problems of unsatisfactory measurement accuracy and difficult improvement of measurement accuracy, and achieve reliable measurement, simple structure, and easy mass production Effect

Active Publication Date: 2019-02-26
苏州致将智能光电有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to: aim at the existing grating sensors existing in the prior art due to the physical structure limitation of the photolithography process, which makes it difficult to improve the measurement accuracy and cannot meet the above-mentioned shortcomings of the increasingly high measurement accuracy requirements, and provides An alternating incremental measuring micro-displacement sensor and its measuring method. The sensor has a simple structure, is suitable for measuring the displacement change of a measured object, has reliable measurement, high precision, and is easy to realize mass production.

Method used

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  • A Measuring Method for Alternate Incremental Measuring Micro Displacement Sensor
  • A Measuring Method for Alternate Incremental Measuring Micro Displacement Sensor
  • A Measuring Method for Alternate Incremental Measuring Micro Displacement Sensor

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Embodiment 1

[0045] Such as Figure 1-3 As shown, a kind of alternating incremental measuring micro-displacement sensor of the present invention includes a laser beam 11, a fixed reflector 2, a moving reflector 3, a detection reflector 4, a photodetector one 5, a photodetector two 6 and processing systems.

[0046] The first photodetector 5 is provided with a first detection part 51, a second detection part 52 and a third detection part 53 at fixed intervals, and the third detection part 53 is arranged on the straight line connecting the first detection part 51 and the second detection part 52 At any position between, the photodetector 2 6 is provided with a fixed-distance detection part 4 61, a detection part 5 62 and a detection part 63, and the detection part 6 63 is arranged on the detection part 4 61 and the detection part At any position between the straight lines of 5 and 62, the fixed reflector 2 and the movable reflector 3 are arranged in parallel and can move relatively, and one...

Embodiment 2

[0051] Such as Figure 1-3 As shown, a kind of alternating incremental measuring micro-displacement sensor and measured object 8 according to the present invention, said sensor includes laser beam 11, fixed reflector 2, moving reflector 3, detection reflector 4, photodetector 1 5, photodetector 2 6 and processing system.

[0052] The object to be measured 8 is fixedly connected to the moving reflector 3, and the photodetector one 5 is provided with a detection part 1 51, a detection part 2 52 and a detection part 3 53 at fixed intervals, and the detection part 3 53 is located at At any position between the straight line connecting the first detection part 51 and the second detection part 52, the second photodetector 6 is provided with four detection parts 61, five detection parts 62 and six detection parts 63 at fixed intervals. The detection part six 63 is arranged at any position between the straight line connecting the detection part four 61 and the detection part five 62,...

Embodiment 3

[0055] Such as Figure 1-3 As shown, an alternating incremental measuring micro-displacement sensor and a measured object 8 according to the present invention, the sensor includes a laser source 1, a laser beam 11, a fixed mirror 2, a moving mirror 3, and a detection mirror 4 , a photodetector one 5 , a photodetector two 6 and a processing system, and also include a casing and a connecting piece 31 .

[0056] The laser beam 11 is obtained by emitting the laser source 1, and the laser source 1, the fixed reflector 2, the movable reflector 3, the detection reflector 4, the photodetector one 5 and the photodetector two 6 are all located in the housing , forming the reading head 7, the reading head 7 is provided with a mounting hole or a sticking piece, the moving mirror 3 is connected to the connecting piece 31, the connecting piece 31 is a rigid piece, and the connecting piece 31 protrudes from the The reading head 7 is externally connected to the measured object 8, and the pho...

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Abstract

The invention discloses a novel alternative incremental sensor for measuring the micrometric displacement. The novel alternative incremental sensor comprises a laser beam, a fixed reflecting mirror, a movable reflecting mirror, a detection reflecting mirror, a photoelectric detector I, a photoelectric detector II and a processing system. In operation of the sensor, the laser beam is continuously reflected to the reflecting mirrors in the fixed reflecting mirror and the movable reflecting mirror which are parallel, and finally irradiates onto the two groups of photoelectric detectors, and the reflecting path of the laser beam can be changed when the distance between the fixed reflecting mirror and the movable reflecting mirror is changed; the laser beam is induced for multiple times by three detection parts on each group of photoelectric detector, the processing system obtains a detection distance value according to the laser-beam induction times and the laser induction sequence of each group of detection parts and the distance processing among the detection parts, and then can calculate out a real change value of the distance between the fixed reflecting mirror and the mobile reflecting mirror by the detection distance value; the novel alternative incremental sensor is simple in structure, reliable in measurement, higher in accuracy and easy in implementation of batch manufacture.

Description

technical field [0001] The invention relates to the field of precision measurement technology and instruments, in particular to an alternating incremental measurement micro-displacement sensor and a measurement method. Background technique [0002] Displacement sensor is a commonly used geometric quantity sensor, which is widely used in many fields such as aerospace, industrial production, machinery manufacturing and military science. There are many ways to measure displacement. Smaller displacements (such as less than 1cm) are usually detected by strain gauges, inductances, differential transformers, eddy currents, and Hall sensors. Larger displacements (such as greater than 1cm) are usually detected by induction synchronization. Sensors, gratings, capacitive grids, magnetic grids and other sensing technologies to measure. Among them, the grating sensor has the advantages of easy digitalization, high precision (currently the highest resolution can reach the nanometer level...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 张白康学亮
Owner 苏州致将智能光电有限公司
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