Novel symmetric small measurement range displacement sensor and measuring method

Abstract

The invention discloses a novel symmetric small measurement range displacement sensor and a measuring method. The sensor comprises a laser beam, a fixed reflecting mirror, a movable reflecting mirror, a double mirror, a photoelectric detector and a processing system. By applying the sensor, the laser beam is divided into two beams which are respectively reflected to one position on the photoelectric detector at a corresponding side, the space between the fixed reflecting mirror and the movable reflecting mirror is changed, then a reflection path of the laser beam can be changed, the laser beam is finally irradiated to another position of the corresponding photoelectric detector, the processing system calculates according to the two groups of two different positions and obtains two detection distance values which are much larger than real change value of the space between the fixed reflecting mirror and the movable reflecting mirror, and the processing system can calculate the real change value of the space between the fixed reflecting mirror and the movable reflecting mirror according to the average value of the two detection distance values. The sensor disclosed by the invention is simple in structure, applicable to measurement when displacement of an object is continuously changed, reliable in measurement and relatively high in accuracy, and batch manufacturing can be easily realized.

Description

technical field [0001] The invention relates to the field of precision measurement technology and instruments, in particular to a novel symmetrical small-range displacement sensor and a measurement method. Background technique [0002] Displacement sensor is a commonly used geometric quantity sensor, which is widely used in many fields such as aerospace, industrial production, machinery manufacturing and military science. There are many ways to measure displacement. Smaller displacements (such as less than 1cm) are usually detected by strain gauges, inductances, differential transformers, eddy currents, and Hall sensors. Larger displacements (such as greater than 1cm) are usually detected by induction synchronization. Sensors, gratings, capacitive grids, magnetic grids and other sensing technologies to measure. Among them, the grating sensor has the advantages of easy digitalization, high precision (currently the highest resolution can reach the nanometer level), strong ant...

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Problems solved by technology

[0005] The purpose of the present invention is to overcome the existing grating sensor existing in the prior art due to the physical structure limitations of the photolithography process, which makes it difficult to improve the measurement accuracy and cannot meet the above-mentioned shortcomings of the increasingly higher measurement accuracy requirements. A new type of symmetrical small-range displacement sensor and measurement method is provided. The sensor has a simple structure and is suitable for the measurement of the continuous change of the displacement of the measured object. The measurement is reliable, the precision is high, and it is easy to realize mass production.

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