Novel symmetric small measurement range displacement sensor and measuring method

A technology of a displacement sensor and a measurement method, which is applied in the direction of measuring devices, instruments, and optical devices, and can solve the problems of unsatisfactory measurement accuracy and difficult improvement of measurement accuracy, and achieve reliable measurement, simple structure, and high precision.

Active Publication Date: 2016-08-31
JIANGSU QIHAO PRECISION MACHINERY
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to overcome the existing grating sensor existing in the prior art due to the physical structure limitations of the photolithography process, which makes it difficult to improve the measurement accuracy and cannot meet the above-mentioned shortcomings of the increasingly higher measurement accu...

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  • Novel symmetric small measurement range displacement sensor and measuring method
  • Novel symmetric small measurement range displacement sensor and measuring method
  • Novel symmetric small measurement range displacement sensor and measuring method

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Embodiment 1

[0042] Such as Figure 1-5 As shown, a new symmetrical small-range displacement sensor described in the present invention includes fixed reflectors 2 and movable reflectors 3 arranged in parallel with adjustable spacing and a processing system.

[0043] Two photodetectors 4 are symmetrically arranged at both ends of the fixed reflector 2 and the movable reflector 3, and a double reflector 7 is arranged between the fixed reflector 2 and the movable reflector 3, and a double reflector 7 is arranged on the fixed reflector 2. There is a through hole 21, a laser beam 11 passing through the through hole 21 is incident on the double reflector 7, and is separated into two laser beams 11 after being reflected by the double reflector 7. The laser beam 11 is incident on the fixed reflector 2, after being alternately reflected by the fixed reflector 2 and the movable reflector 3, it is respectively emitted to the photodetector 4 on the corresponding side to be sensed, and the processing s...

Embodiment 2

[0047] Such as Figure 1-5 As shown, a new type of symmetrical small-range displacement sensor and a measured object 6 according to the present invention, the sensor includes a fixed reflector 2 and a movable reflector 3 arranged in parallel with an adjustable distance, a processing system and a housing.

[0048] The displacement sensor described in this embodiment also includes a laser source 1 for emitting the laser beam 11, two photodetectors 4 are arranged symmetrically at both ends of the fixed reflector 2 and the movable reflector 3, and the fixed reflector 2 A double reflector 7 is arranged between the movable reflector 3, the laser source 1 is located on one side of the fixed reflector 2, and the fixed reflector 2 is provided with a through hole 21, and the laser light source 1 passing through the through hole 21 A laser beam 11 is incident on the double reflector 7, and the double reflector 7 adopts an existing structure, that is, two reflectors (primary mirror and se...

Embodiment 3

[0052] Such as Figure 1-5 As shown, a new symmetrical small-range displacement sensor described in the present invention includes fixed reflectors 2 and movable reflectors 3 arranged in parallel with adjustable spacing and a processing system.

[0053] The difference from Embodiment 1 is that a through hole 21 is provided at the center of the fixed reflector 2, namely:

[0054] Two photodetectors 4 are symmetrically arranged at both ends of the fixed reflector 2 and the movable reflector 3, and a double reflector 7 is arranged between the fixed reflector 2 and the movable reflector 3, and the fixed reflector 2 and the movable reflector 3 Reflector 3 is parallel and symmetrically designed, and the central position of the fixed reflector 2 is provided with a through hole 21. A laser beam 11 passing through the through hole 21 is incident on the double reflector 7, and is reflected by the double reflector. The mirror 7 is separated into two beams of laser beams 11 after being r...

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Abstract

The invention discloses a novel symmetric small measurement range displacement sensor and a measuring method. The sensor comprises a laser beam, a fixed reflecting mirror, a movable reflecting mirror, a double mirror, a photoelectric detector and a processing system. By applying the sensor, the laser beam is divided into two beams which are respectively reflected to one position on the photoelectric detector at a corresponding side, the space between the fixed reflecting mirror and the movable reflecting mirror is changed, then a reflection path of the laser beam can be changed, the laser beam is finally irradiated to another position of the corresponding photoelectric detector, the processing system calculates according to the two groups of two different positions and obtains two detection distance values which are much larger than real change value of the space between the fixed reflecting mirror and the movable reflecting mirror, and the processing system can calculate the real change value of the space between the fixed reflecting mirror and the movable reflecting mirror according to the average value of the two detection distance values. The sensor disclosed by the invention is simple in structure, applicable to measurement when displacement of an object is continuously changed, reliable in measurement and relatively high in accuracy, and batch manufacturing can be easily realized.

Description

technical field [0001] The invention relates to the field of precision measurement technology and instruments, in particular to a novel symmetrical small-range displacement sensor and a measurement method. Background technique [0002] Displacement sensor is a commonly used geometric quantity sensor, which is widely used in many fields such as aerospace, industrial production, machinery manufacturing and military science. There are many ways to measure displacement. Smaller displacements (such as less than 1cm) are usually detected by strain gauges, inductances, differential transformers, eddy currents, and Hall sensors. Larger displacements (such as greater than 1cm) are usually detected by induction synchronization. Sensors, gratings, capacitive grids, magnetic grids and other sensing technologies to measure. Among them, the grating sensor has the advantages of easy digitalization, high precision (currently the highest resolution can reach the nanometer level), strong ant...

Claims

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Application Information

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IPC IPC(8): G01B11/00
CPCG01B11/00
Inventor 张白康学亮
Owner JIANGSU QIHAO PRECISION MACHINERY
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