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Amplitude adjustable terahertz near field excitation type molecular sensor and production method thereof

A molecular sensor and manufacturing method technology, applied in the field of terahertz technology and semiconductor micro-processing, can solve the problems of limiting THz sensing sensitivity and spatial resolution, reducing THz coupling efficiency, etc., to improve sensitivity and spatial resolution, and improve quality. factor, cost reduction effect

Active Publication Date: 2016-09-07
SHANGHAI NORMAL UNIVERSITY
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Problems solved by technology

However, when the THz wave excites multiple dense periodic artificial microstructure resonance units, the scattering effect causes the electromagnetic resonance peak to broaden, and the THz coupling efficiency decreases, which leads to a decrease in the device quality factor (Q factor), which limits the THz transmission. Sensitivity and spatial resolution

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  • Amplitude adjustable terahertz near field excitation type molecular sensor and production method thereof
  • Amplitude adjustable terahertz near field excitation type molecular sensor and production method thereof
  • Amplitude adjustable terahertz near field excitation type molecular sensor and production method thereof

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Embodiment Construction

[0034] How the present invention is implemented will be further described in detail, clearly and completely in combination with specific embodiments below.

[0035] Such as Figure 1-4 As shown, an amplitude-adjustable terahertz near-field excitation molecular sensor of the present invention is composed of a terahertz photoconductive antenna and an electromagnetic resonance unit array on both sides of a semi-insulating gallium arsenide (SI-GaAs) substrate. , the thickness of the semi-insulating gallium arsenide (SI-GaAs) substrate is 625 μm, and the size is 1cm×1cm; the terahertz photoconductive antenna is composed of two T-shaped electrodes distributed symmetrically in mirror images; the horizontal axis of each T-shaped electrode is The outer electrode, the longitudinal axis part is the inner electrode, and the head end of the inner electrode is connected with the outer electrode; the distance between the ends of the two inner electrodes is 50 μm; the electromagnetic resonanc...

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Abstract

The invention relates to an amplitude adjustable terahertz near field excitation type molecular sensor and a production method thereof. The molecular sensor is formed by arranging a terahertz photoconductive antenna and an electromagnetic resonant cell array at two sides of a semi-insulated gallium arsenide substrate. The terahertz photoconductive antenna is composed of two T-shaped electrodes which are distributed in mirror symmetry. The horizontal axis part of each T-shaped electrode is an outer electrode. The vertical axis part is an inner electrode. The head ends of the inner electrodes are engaged with the outer electrodes. The electromagnetic resonant cell array is a periodic cross electromagnetic resonant cell array. According to the sensor and the method, the distances between the terahertz photoconductive antenna and the periodic metal resonant cells are reduced to a 3THz wavelength range; the local oscillation strength of dipoles is improved through near field enhancement; the strength of a terahertz electromagnetic resonant mode is improved; the quality factor of the resonant mode is improved; the sensitivity and spatial resolution of THz molecular detection can be improved; and the optical element layout of the whole spectrum detection system is simplified.

Description

technical field [0001] The invention relates to the technical fields of terahertz technology and semiconductor micromachining, in particular to an amplitude-adjustable terahertz near-field excitation molecular sensor for biomedicine and chemical detection and a manufacturing method thereof. Background technique [0002] The terahertz (THz) band refers to the frequency in the 10 12 Hz, the corresponding wavelength is 300μm, and the corresponding energy level is electromagnetic waves in the range of 0.41-41meV). The energy of this band coincides with the vibrational energy level of biological macromolecules, the rotational energy level of dipoles and the energy level of vibrational transitions, which makes terahertz (THz) technology show great potential in biomedical research, chemical testing, etc. great application potential. [0003] At present, the standard terahertz time-domain spectroscopy system (THz-TDS) is mainly used to study biochemical molecules. A pair of off-ax...

Claims

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Application Information

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IPC IPC(8): B81B7/00B81B7/02B81C1/00G01N21/35
CPCB81B7/0009B81B7/02B81B2207/00B81B2207/99B81C1/00015B81C1/00206G01N21/3586
Inventor 赵振宇宋志强郑孝波
Owner SHANGHAI NORMAL UNIVERSITY
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