Amplitude adjustable terahertz near field excitation type molecular sensor and production method thereof

Abstract

The invention relates to an amplitude adjustable terahertz near field excitation type molecular sensor and a production method thereof. The molecular sensor is formed by arranging a terahertz photoconductive antenna and an electromagnetic resonant cell array at two sides of a semi-insulated gallium arsenide substrate. The terahertz photoconductive antenna is composed of two T-shaped electrodes which are distributed in mirror symmetry. The horizontal axis part of each T-shaped electrode is an outer electrode. The vertical axis part is an inner electrode. The head ends of the inner electrodes are engaged with the outer electrodes. The electromagnetic resonant cell array is a periodic cross electromagnetic resonant cell array. According to the sensor and the method, the distances between the terahertz photoconductive antenna and the periodic metal resonant cells are reduced to a 3THz wavelength range; the local oscillation strength of dipoles is improved through near field enhancement; the strength of a terahertz electromagnetic resonant mode is improved; the quality factor of the resonant mode is improved; the sensitivity and spatial resolution of THz molecular detection can be improved; and the optical element layout of the whole spectrum detection system is simplified.

Description

technical field [0001] The invention relates to the technical fields of terahertz technology and semiconductor micromachining, in particular to an amplitude-adjustable terahertz near-field excitation molecular sensor for biomedicine and chemical detection and a manufacturing method thereof. Background technique [0002] The terahertz (THz) band refers to the frequency in the 10 12 Hz, the corresponding wavelength is 300μm, and the corresponding energy level is electromagnetic waves in the range of 0.41-41meV). The energy of this band coincides with the vibrational energy level of biological macromolecules, the rotational energy level of dipoles and the energy level of vibrational transitions, which makes terahertz (THz) technology show great potential in biomedical research, chemical testing, etc. great application potential. [0003] At present, the standard terahertz time-domain spectroscopy system (THz-TDS) is mainly used to study biochemical molecules. A pair of off-ax...

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Problems solved by technology

However, when the THz wave excites multiple dense periodic artificial microstructure resonance units, the scattering effect causes the electromagnetic resonance peak to broaden, and the THz coupling efficiency decreases, which leads to a decrease in the device quality factor (Q factor), which limits the THz transmission. Sensitivity and spatial resolution

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