SOI LDMOS device with buried field plates
A field plate and device technology, applied in the field of SOILDMOS devices, can solve problems such as limiting the application of SOI devices, and achieve the effect of improving the self-heating effect
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[0019] In order to make the purpose, technical solution and advantages of the present invention clearer, the present invention will be described in detail below in conjunction with the accompanying drawings.
[0020] Such as figure 1 shown, for existing SOI LDMOS devices such as figure 2 As shown, an SOI LDMOS device with a buried oxygen field plate includes a P-type substrate 1, a buried oxide layer 2, a channel region 5, a drift region 6, a source P+ region 7, a source N+ region 8, a drain N+ region 9, source 12, drain 13, gate 15 and gate oxide layer 14; characterized in that it also includes source buried oxygen field plate 3, drain buried oxygen field plate 4, first connection metal 10, second connection Metal 11; the buried oxygen layer 2 is provided with a source buried oxygen field plate 3 and a drain buried oxygen field plate 4; the drain electrode 13 is connected to the drain buried oxygen field plate 4 through the first connecting metal 10, and the source electrod...
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