Corrosion-resistant high-reflection front mirror and preparation method thereof

A high-reflective, corrosion-resistant technology, applied in optics, mirrors, optical components, etc., can solve the problems of easy damage, weak scratch resistance of the dielectric layer, weakened absorption of reflected energy and light, and achieve simple preparation process and overcome The preparation process is complicated, the technology is insufficient, and the effect of high reflectivity

Active Publication Date: 2016-09-21
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there are the following technical deficiencies: 1. The light passes through the glass substrate twice, which weakens the reflected energy and must use particularly expensive glass to reduce the absorption of light; 2. The light reflected by the glass surface and the reflective layer will interfere with each other. Insufficient in development
Unfortunately, the dielectric layer has weak scratch resistance and is prone to damage. Once damaged, it will cause problems for the high-definition development of the reflective layer.
[0007] In summary, in the field of front mirror technology, there is still a lack of a new technology that is highly reflective, corrosion-resistant, scratch-resistant, and simple to prepare.

Method used

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  • Corrosion-resistant high-reflection front mirror and preparation method thereof
  • Corrosion-resistant high-reflection front mirror and preparation method thereof

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Experimental program
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Effect test

Embodiment 1

[0039] Front mirror of the present invention adopts physical vapor phase magnetron sputtering deposition, as figure 1 As shown, first put the flat plate-shaped glass substrate 1 into acetone, absolute ethanol, and deionized water for 15 minutes, and then blast it in a drying oven at a temperature of 100 ° C for 2 hours; then fix it in a vacuum chamber On the rotatable sample stage, the plasma generated by argon gas was used to etch it for 10 min. When the chamber vacuum is less than 2×10 -5 Pa, rush into Ar gas and adjust the sputtering pressure to 0.5Pa, select the composition as (Ti 75 Al 25 ) 50 B 50 The target is connected to the pulse power supply, and the power density of the target is adjusted to 8.5W / cm 2 , and the substrate was grounded and heated at 100°C, then the baffle was opened, and the surface of the glass substrate 1 was deposited to obtain the composition (Ti 75 Al 25 ) 50 B 50 Reflective coating2.

[0040] The reflective coating has an amorphous st...

Embodiment 2

[0042] Front mirror of the present invention adopts physical vapor phase magnetron sputtering deposition, as figure 1 As shown, first put the flat plate-shaped glass substrate 1 into acetone, absolute ethanol, and deionized water for 20 minutes, and then blast it in a drying oven at a temperature of 80 ° C for 2 hours; then fix it in a vacuum chamber On the rotatable sample stage, the plasma generated by argon gas was used to etch it for 20 min. When the chamber vacuum is less than 1×10 -5 Pa, rush into Ar gas and adjust the sputtering pressure to 0.7Pa, select the composition as (Ti 92 Mo 8 ) 70 B 30 The target is connected to the pulse power supply, and the power density of the target is adjusted to 20W / cm 2 , and the substrate was subjected to -20V DC bias and heated at 300°C, then the baffle was opened, and the surface of the glass substrate 1 was deposited to obtain a composition of (Ti 92 Mo 8 ) 70 B 30 Reflective coating2.

[0043] Detected by X-ray diffractom...

Embodiment 3

[0045] Front mirror of the present invention adopts physical vapor phase magnetron sputtering deposition, as figure 1 As shown, firstly, put the flat glass substrate 1 into acetone, absolute ethanol, and deionized water for 10 minutes, and then use high-purity N with a purity of 99.99%. 2 Blow dry; then fix it on a rotatable sample stage in a vacuum chamber, and etch it for 15 min with plasma generated by argon gas. When the chamber vacuum is less than 3.6×10 -5 Pa, rush into Ar gas and adjust the sputtering pressure to 0.5Pa, select the composition as Ti 50 B 50 The target is connected to the pulse power supply, and the power density of the target is adjusted to 13W / cm 2 , and the substrate was treated with pulsed negative bias of -30V and heated at 200°C, then the baffle was opened, and the surface of the glass substrate 1 was deposited to obtain a composition of Ti 50 B 50 reflective coating2.

[0046] Detected by X-ray diffractometer (XRD), the coating has an amorpho...

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Abstract

The invention discloses a corrosion-resistant high-reflection front mirror, which comprises a glass substrate and a reflective coating deposited on the glass substrate, wherein the reflective coating is of an amorphous structure, the coating is compact, and a component of the reflective coating is (Ti<100-x>Me<x>)<y>B<100-y>, wherein x is greater than or equal to 0 and less than or equal to 25, y is greater than or equal to 50 and less than or equal to 80, and Me comprises Mo or Al. The front mirror disclosed by the invention has the advantages of high reflection rate, corrosion resistance and scratch resistance. The invention further discloses a preparation process of the front mirror. The process is simple.

Description

technical field [0001] The invention relates to the field of mirror preparation, in particular to a corrosion-resistant and highly reflective front mirror and a preparation method thereof. Background technique [0002] Mirrors are objects used to reflect light and have important applications in many fields. Such as car rearview mirrors, vanity mirrors in bathrooms, reflectors on scientific instruments and equipment, periscopes on submarines, etc., reflectors in electronic equipment such as flat panel displays, projection TVs, scanners, copiers, etc. [0003] Most mirrors are constructed by depositing a metal such as silver, aluminum or chromium on a glass substrate to form a reflective layer, and then coating the reflective layer with a protective layer such as polymer, metal oxide or oxynitride to protect the reflective layer from damage. Effects of mechanical, chemical and other corrosion. This kind of mirror generally has a reflective layer on the back of the mirror, an...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B1/14G02B5/08C03C17/09C03C15/02
CPCC03C15/02C03C17/09C03C2217/283C03C2218/156G02B1/14G02B5/0808
Inventor 黄峰孟凡平李朋徐相英
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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