Clean chemical work station

Abstract

The invention relates to a clean chemical work station which includes a clean work bench and a water bath heating tank and a clean water tank which are arranged therein. The clean work station includes a gas inlet system, a gas exhaust system and a work chamber. A transparent end plate, in which an operation hole is formed, is arranged on the outer end of the work chamber. One side, which is closed to the transparent end plate, of the work chamber is a transparent insulation plate. An insulation layer is formed between the transparent end plate and the transparent insulation plate. The gas exhaust system includes a gas exhaust port which is arranged below the insulation layer, and a gas pumping apparatus which is connected to the gas exhaust port through a gas exhaust pipeline. In the invention, the water bath heating tank and the clean water tank are disposed in the clean work bench, so that a clean environment for chemical etching is provided, and meanwhile, volatile gas is prevent from escaping into atmosphere, so that damage of the volatile gas to body during the chemical etching is avoided. A user can carry out work with the clean work bench in a normal environment without any special dust-free room, so that the clean work station can greatly reduce cost and has important significance on scientific research and education.

Description

technical field [0001] The invention relates to a purification chemical workstation, which belongs to the technical field of microelectronic process equipment. Background technique [0002] Chemical etching is a common process step in the solar cell manufacturing process. The exposed silicon wafer is put into an etching solution for etching, and then cleaned with deionized water. Since the microelectronics industry requires a clean environment, chemical etching and cleaning are performed in a clean room. However, for the operators who are also in the clean room, the harmful substances volatilized during the etching process will adversely affect their health. [0003] In industrial production and scientific research, dust-free working environment is required in many places. The purification workbench can provide an effective working environment for these purposes and improve the efficiency of production and scientific research. The inventor imagines that if the chemical pa...

AI Technical Summary

Problems solved by technology

[0007] However, this kind of purification workbench will inevitably have a small amount of gas leaking from the high-pressure area. When there is high-risk toxic gas, the purification workbench becomes less safe and reliable

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