Lead zirconate titanate/ruthenium acid strontium ferroelectric superlattice material and preparation method thereof
A technology of lead zirconate titanate and superlattice, which is applied in the direction of piezoelectric/electrostrictive/magnetostrictive devices, circuits, electrical components, etc., can solve the problems of restricting the selection of other functional properties of superlattice materials, and achieve excellent Dielectric and ferroelectric properties, broad application prospects, simple preparation process
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Embodiment 1
[0037] (PZT-12 / SRO-2) / SRO / STO Ferroelectric Superlattice Materials
[0038] (1) SrTiO 3 (001) The substrate was cleaned by microwave ultrasonic in acetone and alcohol for 20 minutes, then the substrate was heated to 750° C. in vacuum, and annealed for 60 minutes;
[0039] (2) Using the pulsed laser deposition method under the conditions of a deposition temperature of 750 ° C and an oxygen pressure of 5 Pa, on SrTiO 3 (001) deposition thickness on the substrate is a strontium ruthenate layer of 14nm;
[0040] (3) Under the condition that the deposition temperature is lowered to 650°C and the oxygen pressure is maintained at 5Pa, the lead zirconate titanate target is bombarded with a laser, and a lead zirconate titanate layer with a thickness of 12 units is deposited on the strontium ruthenate layer. Then, the target is converted to strontium ruthenate, and the strontium ruthenate target is bombarded with laser light to deposit a strontium ruthenate layer with a thickness of 2...
Embodiment 2
[0045] (PZT-12 / SRO-1) / SRO / STO Ferroelectric Superlattice Materials
[0046] 1) SrTiO 3 (001) The substrate was cleaned by microwave ultrasonic in acetone and alcohol for 20 minutes, then the substrate was heated to 750° C. in vacuum, and annealed for 60 minutes;
[0047] (2) Using the pulsed laser deposition method under the conditions of a deposition temperature of 750 ° C and an oxygen pressure of 5 Pa, on SrTiO 3 (001) deposition thickness on the substrate is a strontium ruthenate layer of 20nm;
[0048] (3) Under the condition that the deposition temperature is lowered to 650°C and the oxygen pressure is maintained at 5Pa, the lead zirconate titanate target is bombarded with a laser, and a lead zirconate titanate layer with a thickness of 12 units is deposited on the strontium ruthenate layer. Then, the target is converted to strontium ruthenate, and the strontium ruthenate target is bombarded with a laser to deposit a strontium ruthenate layer with a thickness of 1 unit...
Embodiment 3
[0053] (PZT-12 / SRO-3) / SRO / STO Ferroelectric Superlattice Materials
[0054] (1) SrTiO 3 (001) The substrate was cleaned by microwave ultrasonic in acetone and alcohol for 20 minutes, then the substrate was heated to 750° C. in vacuum, and annealed for 60 minutes;
[0055] (2) Using the pulsed laser deposition method under the conditions of a deposition temperature of 750 ° C and an oxygen pressure of 5 Pa, on SrTiO 3 (001) deposition thickness on the substrate is a strontium ruthenate layer of 14nm;
[0056] (3) Under the condition that the deposition temperature is lowered to 650°C and the oxygen pressure is maintained at 5Pa, the lead zirconate titanate target is bombarded with laser light, and a lead zirconate titanate layer with a thickness of 12 units is deposited on the strontium ruthenate layer. Then, the target is converted to strontium ruthenate, and the strontium ruthenate target is bombarded with a laser to deposit a strontium ruthenate layer with a thickness of 3...
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