Optical fiber Mach-Zehnder sensor based on femtosecond laser micromachining and its manufacturing method

Abstract

The invention discloses a manufacturing method of a femtosecond laser micromachining-based optical fiber Mach-Zehnder's sensor. The manufacturing method comprises 1, taking a monomode optical fiber, stripping an optical fiber coating through a fiber stripper and cutting the optical fiber through a cutter to obtain a neat optical fiber end surface, 2, carrying out femtosecond laser micromachining, wherein in laser micromachining, laser has wavelength of 800nm, a repetition rate of 1KHz, pulse width of 120fs and the highest output power of 100mW, has the power of about 1mW after passing through a shutter and an attenuation slice and is focused on the optical fiber end surface through a 20-fold objective lens and the optical fiber is fixed to a 3D translation table with a precision of 0.1 microns, 3, carrying out ablation on the optical fiber end surface to obtain a rectangle with width of 28 microns, length of 32 microns and depth of 40-50 microns, wherein a distance between the center of the rectangle and an optical fiber central axis is 18 microns, and 4, cleaning the ablated optical fiber end surface through alcohol for 1min, and welding the cleaned optical fiber end surface to the other untreated optical fiber end surface so that air bubbles are formed in the welded optical fiber and the optical fiber Mach-Zehnder's sensor is obtained. The manufacturing method is free of hydrofluoric acid corrosion and tapering, carries out micromachining on the optical fiber end surface and has the advantages of micromachining safety, fastness, east control, small size and good fastness.

Description

technical field [0001] The invention belongs to the field of optical fiber sensors, and in particular relates to an optical fiber Mach-Zehnder sensor and a manufacturing method thereof. Background technique [0002] Optical fiber sensor is one of the small-sized sensor heads that can be practical at present. It has excellent performances such as anti-electromagnetic interference, anti-radiation, high sensitivity, light weight, insulation and explosion-proof, and corrosion resistance. In particular, the size of the optical fiber is small, and With good optical transmission properties, it will become an important choice for the preparation of networked micro-sensors, so it is favored and valued by researchers at home and abroad. The development trend of fiber optic sensors is miniaturization and high performance. Therefore, new fiber optic sensors with the advantages of small size, high sensitivity, fast response speed and trace detection have become a research hotspot in rece...

AI Technical Summary

Problems solved by technology

Most of the existing optical fiber sensors adopt the Mach-Zehnder interferometer structure. For example, the invention patent with the publication number CN104215270A "All-fiber sensor processed by femtosecond laser pulse sequence and its manufacturing method" adopts femtosecond laser pulse sequence micromachining and hydrogen The method of hydrofluoric acid corrosion, the processing and production process is very complicated, it is not convenient for mass production, and it is limited in actual use

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