Novel multi-stable ultrasonic detection sensor

Abstract

The invention relates to a novel multi-stable ultrasonic detection sensor which is used in the field of ultrasonic detection and includes: an acoustic resistance matching layer, a metal electrode, a piezoelectric film, a high-voltage-resistant insulating layer, a hollow chamber sealing layer, a back lining layer, and an electromechanical control circuit board. The ultrasonic detection sensor can achieve a multi-stable working mode of combination of piezoelectric ultrasonic sensing and capacitive ultrasonic sensing on one ultrasonic transducer unit through the electromechanical control circuit board, wherein each stable working mode can be designed according to optional ultrasonic frequencies, for example, a design scheme of capacitive low frequency ultrasonic sensing and piezoelectric high frequency ultrasonic sensing, thus considering both the depth and resolution of ultrasonic detection. The multi-stable ultrasonic detection sensor can be flexibly applied in ultrasonic detection on gas-phase, liquid-phase and solid-phase mediums, is simple in resistance matching, is small in size and is easy to integrate, can be produced in large scale and is low in cost, and has application prospects in the fields of underwater acoustic detection, bio-medical imaging, industrial ultrasonic non-destructive testing, etc.

Description

technical field [0001] The invention relates to a novel multi-stable ultrasonic detection sensor, which is mainly used for ultrasonic detection and ultrasonic imaging. Specifically, it uses a control circuit to realize piezoelectric ultrasonic sensing and capacitive ultrasonic sensing on the same ultrasonic transducer unit. The multi-stable working mode of the combination of ultrasonic sensors is suitable for underwater acoustic wave detection, biomedical imaging, and industrial ultrasonic nondestructive testing and other fields. Background technique [0002] Ultrasound is an elastic wave with a frequency higher than the hearing threshold. It has the characteristics of concentrated sound energy, good directionality, strong penetrating power, and long propagation distance in water. Has a broad application background. Ultrasonic transducers are energy conversion devices that convert alternating electrical signals into acoustic signals or convert acoustic signals in the extern...

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Problems solved by technology

Although the piezoelectric micro-machined ultrasonic transducer can realize two working modes of bending vibration and thickness vibration (Hedegaard T, Pedersen T, Thomsen E V, et al.Screenprinted thick film based pMUT arrays[C] / / 2008IEEE Ultrasonics Symposium.IEEE, 2008:2126-2129.), but a transducer unit can only select one of the modes to work, and cannot be selectively switched, which has the inherent disadvantages of piezoelectric ultrasonic transducers, and the two working modes increase the impedance matching of the device The difficulty further affects the performance of the sensor

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