Measuring apparatus and measuring method of spot centroid extraction accuracy
A technology of extraction accuracy and measurement device, applied in the measurement field of spot centroid extraction accuracy, can solve the problems of difficult measurement accuracy, measurement system error, etc., and achieve the effects of good high-frequency characteristics, high system integration, and high performance
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[0019] The specific embodiment of the present invention will be further described below in conjunction with accompanying drawing:
[0020] The device of the present invention is a high-precision measuring method for spot centroid extraction accuracy as attached figure 1 As shown, the piezoelectric ceramic driver is used to drive the mirror to generate high-frequency oscillation, as shown in the attached figure 2 As shown, the piezoelectric ceramic driver is selected from the S220.8SL series produced by PI Company, its mechanical deflection angle range is ±5mrad, and the execution resolution is below 1urad. The light beam emitted by the laser reaches the reflector after a 2cm optical path, and the swing information of the reflector is as follows: image 3 As shown, the frequency is 100Hz, the maximum swing angle is 25urad, and the linear displacement of the light source is simulated as Figure 4 As shown, the linear displacement is 1um and the frequency is 100Hz. After passi...
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