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Method for prolonging service life of electroformed microfluidic nickel die and electroformed microfluidic nickel die

An electroforming mold and microfluidic technology, applied in electroforming, electrolysis process, etc., can solve the problems of pattern deformation, polishing, etc.

Active Publication Date: 2016-12-14
北京同方光盘股份有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When this technology is applied to microfluidic chips, the groove depth and width of the information layer range from 20 μm to 200 μm, or even larger. In terms of dimensions, it is 100-1000 times that of the original active optical disc mold design. like figure 2 As shown, because the groove is too wide and too deep, electroforming and grinding cannot polish it flat, resulting in the back of the pattern on the nickel mold being suspended during injection molding, that is, the back of the information layer is suspended. Under a large-tonnage injection molding machine, Instantly lead to deformation of the pattern area, therefore, the microfluidic nickel mold suitable for disc injection molding machine prepared by this method has a certain life limitation and needs to be optimized

Method used

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  • Method for prolonging service life of electroformed microfluidic nickel die and electroformed microfluidic nickel die

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Embodiment 2

[0041] A method for preparing an electroformed microfluidic nickel mold, the steps are as follows:

[0042] 1. According to the pattern designed by microfluidics, design and prepare a negative mask plate for future use.

[0043] 2. Choose glass as the substrate, and after cleaning, spin-coat negative photoresist on the glass substrate. The photoresist used is SU-8 3050 photoresist. The specific spin-coating method is: The glass is fixed on the rotary table, and the glue is uniformed first; then the glue is brushed.

[0044] 3. First perform soft drying and exposure treatment; then perform intermediate drying and development treatment to obtain photoresist patterns.

[0045] 4. Perform magnetron sputtering nickel on the photoresist pattern to obtain a photoresist pattern with metallization on the surface.

[0046] 5. Put the metallized photoresist pattern into the nickel-containing electroforming solution, and use it as a cathode for electroforming for 72 hours to obtain a ni...

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Abstract

The invention relates to a method for prolonging the service life of an electroformed microfluidic nickel die. The method comprises the steps that according to a pattern designed through microfluidic, a negative mask plate is designed and prepared; a substrate is coated with negative photoresist in a spinning manner; the negative mask plate is used for conducting exposure and developing treatment on the photoresist on the substrate; a photoresist pattern obtained after developing treatment is subjected to surface metallization treatment; a photoresist die with the metalized surface is subjected to electroforming treatment, and an electroformed die is obtained; and the electroformed die is subjected to thinning and grinding treatment, and the needed electroformed microfluidic nickel die is obtained. According to the method, the thickness of a nickel plate in the electroformed microfluidic nickel die is reasonably designed and arranged, then a precise grinding device is utilized for grinding the back of the electroformed nickel die flat, so that through the method, the mechanical strength of the nickel die is improved, the service life of the microfluidic nickel die is greatly prolonged, the die preparing cost is saved, and the inter-chip uniformity of microfluidic chips is indirectly improved.

Description

technical field [0001] The invention relates to the technical field of microfluidic mold preparation, in particular to a method for improving the service life of an electroformed microfluidic nickel mold and an electroformed microfluidic nickel mold. Background technique [0002] Microfluidics integrates the basic operation units such as sample preparation, reaction, separation, and detection in the biological, chemical, and medical analysis processes into a micron-scale chip to automatically complete the entire analysis process. Due to its great potential in the fields of biology, chemistry, and medicine, it has developed into a new research field interdisciplinary in biology, chemistry, medicine, fluid, electronics, materials, and machinery. How to prepare microfluidic chips quickly and at low cost has become a necessary condition for its wide application. [0003] The optical disc injection molding machine has high intra-chip injection precision, high inter-chip repetiti...

Claims

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Application Information

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IPC IPC(8): C25D1/10
CPCC25D1/10
Inventor 郭哲刘祝凯许斌李晓龙胡在兵
Owner 北京同方光盘股份有限公司
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