A kind of preparation method of extremely high vacuum ionization gauge
A technology of extremely high vacuum and ionization gauges, which is applied in the direction of vacuum gauges, particle separation tubes, design optimization/simulation, etc. that use ionization effects, to achieve the effects of improving overall performance, saving development costs, and shortening development cycles.
Active Publication Date: 2019-08-23
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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Problems solved by technology
[0004] At present, research on the performance of new ionization gauges at home and abroad usually only adopts experimental qualitative analysis methods, and it is difficult to systematically optimize and analyze the performance of ionization gauges.
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Embodiment 1
[0034] A preparation method for an extremely high vacuum ionization gauge, the method comprising the following steps:
[0035] step one:
[0036] Establish a physical model of the standard sample ionization gauge according to the electrode parameters of the standard sample ionization gauge, and numerically solve the physical model to obtain the electric field distribution and potential distribution at any position of the physical model;
[0037] Since the ultra-high vacuum ionization gauge usually works in the ultra-high / high-vacuum environment, the space charge effect, the interaction between electrons and the influence of the electron motion on the electrostatic field are ignored in the calculation; the electric field distribution is calculated by solving the Rapp Ras equation ① is obtained, U in equation ① is the electrode voltage, and the x, y and z respectively represent the projections of ions or electrons on the x-axis, y-axis and z-axis in the Cartesian coordinate syst...
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The invention discloses a production method of an extreme-high vacuum ionization gauge and belongs to the technical field of extreme-high vacuum measurement. The method comprises the following steps: firstly, calculating electric field distribution and potential distribution of a standard ionization gauge physical model; secondly, calculating an effective electron motion trajectory by adopting an electron optical simulation method; obtaining a quantitative relationship corresponding to sensitivity electrode parameters by adopting a sensitivity comparison method; selecting the electrode parameters according to the quantitative relationship for producing an ionization gauge test piece, calculating and establishing a quantitative relationship of the sensitivity of the ionization gauge test piece and the electrode parameters by experiments; correcting and then establishing a standard physical model of the ionization gauge; calculating to obtain electrode parameters of the extreme-high vacuum ionization gauge according to a function relationship of microscopic parameters of the standard physical model and the electrode parameters; producing the extreme-high vacuum ionization gauge according to the electrode parameters.
Description
technical field [0001] The invention relates to a preparation method of an extremely high vacuum ionization gauge, in particular to a method suitable for a vacuum degree lower than 10 - 9 The preparation method of the vacuum ionization gauge of Pa belongs to the technical field of extremely high vacuum measurement. Background technique [0002] With the development of space technology in various countries, especially the development of deep space exploration activities, there is an urgent need for ultra-high / high-vacuum measurement technology, which requires -10 Pa), interplanetary space (presumably the lowest pressure is about 10 -13 In situ real-time detection in extremely high vacuum environments such as Pa), in order to deeply understand the characteristics of the vacuum or atmospheric environment of the universe, and provide important data for human research on the science of universe vacuum and the development and utilization of planetary resources. Therefore, very ...
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IPC IPC(8): G06F17/50H01J41/02G01L21/30
CPCG01L21/30G06F30/20H01J41/02Y02E60/00
Inventor 肖玉华李得天张虎忠成永军王永军李丹明
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH