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Welding method of tungsten-titanium target assembly

A tungsten-titanium target material and a welding method technology are applied in the field of target material manufacturing, which can solve the problems of low welding strength and achieve the effect of improving the welding strength

Active Publication Date: 2019-05-10
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the tungsten-titanium target assembly produced by the welding method of the existing tungsten-titanium target assembly has the problem of low welding strength

Method used

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  • Welding method of tungsten-titanium target assembly

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Embodiment Construction

[0025] As mentioned in the background art, the welding strength of existing welding methods is relatively low.

[0026] Therefore, the present invention provides a new welding method for tungsten-titanium target components, which can stabilize the manufacturing process of the tungsten-titanium target components, ensure the welding quality, and improve the welding strength of the tungsten-titanium target components.

[0027] In addition, the present invention uses tin solder to weld the tungsten-titanium target and the back plate, which can improve the welding strength of the tungsten-titanium target component product and increase the service temperature of the tungsten-titanium target component product.

[0028] In order to make the above objects, features and advantages of the present invention more comprehensible, specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0029] An embodiment of the presen...

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Abstract

The invention discloses a method for welding a tungsten-titanium target material assembly. The method comprises the steps of providing a tungsten-titanium target material and a back plate; putting a first amount of welding flux into a welding face of the tungsten-titanium target material, and conducting first infiltration treatment; putting a second amount of welding flux into a welding face of the back plate, and conducting second infiltration treatment; after the second infiltration treatment is completed, adding a third amount of welding flux to the welding face of the back plate; and after the third amount of welding flux is added to the welding face of the back plate and the first infiltration treatment is completed, buckling the welding face of the tungsten-titanium target material to the welding face of the back plate. By means of the welding method, welding strength of the tungsten-titanium target material assembly can be improved.

Description

technical field [0001] The invention relates to the field of target material manufacturing, in particular to a welding method for a tungsten-titanium target component. Background technique [0002] Physical Vapor Deposition (PVD) is widely used in high-end industries such as optics, electronics, and information, such as integrated circuits, liquid crystal displays, industrial glass, camera lenses, information storage, ships, and chemicals. The alloy target used in physical vapor deposition is one of the most important raw materials in the manufacturing process of integrated circuits and liquid crystal displays. With the continuous development of physical vapor deposition technology, the demand and quality requirements for alloy targets are increasing day by day. Among them, the welding strength of alloy target components is an important factor affecting the use of alloy targets. [0003] Tungsten-titanium targets are widely used in the fields of semiconductor chip manufact...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K1/08B23K1/20
CPCB23K1/0008B23K1/08B23K1/20
Inventor 姚力军潘杰相原俊夫大岩一彦王学泽袁海军
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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