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Electrode shaft driving device of extraction electrode

A technology for extracting electrodes and driving devices, applied in circuits, discharge tubes, electrical components, etc., can solve the problems of large rotation angle, poor adjustment accuracy, and inability to adjust small angles, and achieve high adjustment accuracy, continuous adjustment, and structure. simple effect

Active Publication Date: 2017-02-15
BEIJING SHUOKE ZHONGKEXIN ELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because the electrode drive device of the ion implanter uses two-stage gear meshing to drive the electrode shaft to rotate, the adjustment accuracy is poor, and the rotation angle of the gear rotation is too large, and the adjustment of a small angle cannot be realized, and continuous adjustment cannot be realized.

Method used

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  • Electrode shaft driving device of extraction electrode
  • Electrode shaft driving device of extraction electrode
  • Electrode shaft driving device of extraction electrode

Examples

Experimental program
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Effect test

Embodiment 1

[0024] like Figure 1 to Figure 3 As shown, the electrode shaft driving device of the lead-out electrode of the present embodiment includes a motor 1, a driving pulley 2, a driven pulley 3 and a transmission belt 4 wound around the driving pulley 2 and the driven pulley 3, and the motor 1 The output shaft of the output shaft is connected with the wheel shaft of the driving pulley 2 through a coupling, and also includes a continuous adjustment assembly 5. The continuous adjustment assembly 5 includes a cam 51, a swing rod 52 and a ring for making the swing end of the swing rod 52 and the cam 51 close to each other. The elastic member 53 and the cam 51 are installed on the wheel shaft of the driven pulley 3, and the swing rod 52 is installed on the electrode shaft 61 of the lead-out electrode 6. The drive device installs the swing rod 52 on the electrode shaft 61, and the swing end of the swing rod 52 Closely attached to the cam 51, when the cam 51 rotates, it overcomes the elas...

Embodiment 2

[0029] like Figure 4 to Figure 5 As shown, the structure of the electrode shaft driving device for the lead-out electrode of this embodiment is basically the same as that of Embodiment 1, the difference is that the measurement of the rotation angle is realized by the multi-turn rotary potentiometer 72 installed on the motor 1 .

[0030] The working principle of the electrode shaft driving device for extracting electrodes of the present invention is as follows:

[0031] Start the motor 1, the motor 1 drives the driving pulley 2 to rotate, the driving pulley 2 drives the driven pulley 3 to rotate through the transmission belt 4, the cam 51 and the driven pulley 3 rotate synchronously, the cam 51 promotes the bearing 54 to move during the rotation process, and then The swing rod 52 is made to swing, and the swing of the swing rod 52 is converted into the rotation of the electrode shaft 61 , and finally the continuous adjustment of the electrode shaft 61 is realized.

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Abstract

The invention discloses an electrode shaft driving device of an extraction electrode. The electrode shaft driving device comprises a motor, a driving belt pulley, a driven belt pulley, a transmission belt wound on the driving belt pulley and the driven belt pulley and a continuous adjusting assembly; an output shaft of the motor is connected with a wheel axle of the driving belt pulley; the continuous adjusting assembly comprises a cam, an oscillating bar and an elastic part; the elastic part is used for making an oscillating end of the oscillating bar clung to the cam; the cam is arranged on the wheel axle of the driven belt pulley; and the oscillating bar is arranged on an electrode shaft of the extraction electrode. The electrode shaft driving device of the extraction electrode has the advantages of being simple in structure and the like, and continuous adjustment and micro-angle adjustment can be achieved.

Description

technical field [0001] The invention relates to a SiC high-temperature high-energy ion implanter, in particular to an electrode shaft driving device for a lead-out electrode. Background technique [0002] As a third-generation semiconductor material, SiC is widely used in the production of a new generation of high-efficiency and energy-saving power electronic devices, involving various fields of the national economy. The function of the SiC high-temperature high-energy ion implanter is to accelerate the ions of the elements to be doped, so that the impurity ions with high kinetic energy directly enter the crystal lattice in the SiC wafer, and anneal activation after ion implantation. Firstly, plasma is generated by the ionization of the gas sent into the arc chamber of the ion source, and the positively charged ions are drawn out of the arc chamber by the extraction electrode, thereby forming an ion beam. When a negative high voltage is applied to the extraction electrode, ...

Claims

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Application Information

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IPC IPC(8): H01J37/317H01J37/30
CPCH01J37/3002H01J37/3171
Inventor 彭立波袁卫华易文杰钟新华胡振东王迪平孙雪平
Owner BEIJING SHUOKE ZHONGKEXIN ELECTRONICS EQUIP CO LTD
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