Semiconductor production line closed-loop scheduling control method

Abstract

The invention relates to a semiconductor production line closed-loop scheduling control method. The method comprises a scheduling model database obtaining step, i.e., establishing a scheduling model database in an offline mode according to production line historical data; a symbiosis simulation system establishment step; a scheduling scheme generation step, i.e., according to a scheduling target, selecting a corresponding scheduling model from the scheduling model database, generating a corresponding scheduling scheme, simultaneously applying the scheduling scheme into a semiconductor actual production line and a simulation model, and running a symbiosis simulation system; and an online closed-loop scheduling step, i.e., respectively sampling production performance of the semiconductor actual production line and the simulation model in a set sampling period, according to the sampled production performance, determining whether current sampling time is dynamic scheduling time, if so, executing the scheduling scheme generation step, and otherwise, continuously performing determination on next sampling time. Compared to the prior art, the method has the advantages of effectively reducing scheduling decision-making time, ensuring stable production performance, improving scheduling effectiveness and the like.

Description

technical field [0001] The invention relates to the field of automatic production scheduling, in particular to a closed-loop scheduling control method for a semiconductor production line. Background technique [0002] Under certain constraints, how to decompose the tasks in the manufacturing system, how to arrange the decomposed tasks, and obtain the optimal production performance are the problems that the manufacturing system scheduling needs to solve. The semiconductor production line is a typical complex manufacturing system due to its large scale, high degree of coupling, high reentrancy, and high uncertainty. Dynamic scheduling methods are often used to realize its production scheduling. [0003] Some researchers use the method of real-time analysis of one or some production information of the production line (equipment bottleneck degree, attributes of workpieces to be processed, etc.) to determine the production material feeding and dispatching strategy, so as to achie...

AI Technical Summary

Problems solved by technology

In the actual production operation, due to the existence of random factors, such as the random distribution of processing time, the implementation of the scheduling plan will have cumulative errors. When the cumulative error exceeds a certain limit, the current scheduling plan has become invalid. Therefore, periodic scheduling ( Time-based scheduling) cannot meet the purpose of production scheduling optimization; on the other hand, when the production line is running stably or the production line is running under light load, when a device with a low workload (non-bottleneck device) goes down, it does not affect To the effective implementation of the current scheduling scheme, therefore, there is no need to regenerate the scheduling scheme, and event-based scheduling will generate unnecessary losses at this time

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